Abstract: The present invention provides a thin film manufacturing device capable of preventing crack damage of a crucible by, while maintaining a melt state of a film formation material in the crucible, tilting the crucible to discharge substantially the entire amount of film formation material from the crucible.

Abstract: A negative electrode active material layer 3 containing at least one element selected from the group consisting of silicon, germanium, and tin is formed on a negative electrode collector 1. A negative electrode 11 is prepared by forming a lithium metal layer on the negative electrode active material layer 3. Also prepared is a positive electrode 11 having a configuration in which a positive electrode active material layer 6 containing a composite oxide represented by a general formula Li1-xMO2, where 0.2?x?0.6, and M includes at least one transition metal selected from the group consisting of cobalt, nickel, and manganese, is formed on a positive electrode current collector 5. A lithium secondary battery 100 is assembled from the negative electrode 13, the positive electrode 11, and a separator 4.

Abstract: A thin film forming apparatus (100) includes: a vacuum chamber (1); a substrate transfer mechanism (40) that is provided in the vacuum chamber (1) and feeds an elongated substrate (8) to a predetermined film forming section (4) that faces a film forming source (27); an endless belt (10) capable of moving in accordance with the feeding of the substrate (8) by the substrate transfer mechanism (40), and configured to define, along an outer peripheral surface of the endless belt itself, a transfer path of the substrate (8) in the film forming section (4) so that a thin film is formed on a surface of the substrate (8) that is being transferred linearly; a through-hole (16) formed in the endless belt (10); and a substrate cooling unit (30) for introducing a cooling gas between the endless belt (10) and a back surface of the substrate (8) through the through-hole (16) from a side of an inner peripheral surface of the endless belt (10) that is moving.

Abstract: Particles coming from an evaporation source 9 are deposited on a substrate 21 at a predetermined film forming position 33 in a vacuum so as to form a thin film on the substrate 21. A bulk material 32 containing a source material of the thin film is melted above the evaporation source 9, and the melted material is supplied to the evaporation source 9 in the form of droplets 14. A silicon material 32 including a plurality of pores therein is used as the bulk material 32. Preferably, the pores have a lower average internal pressure than an atmospheric pressure. More preferably, the average internal pressure is 0.1 atm or less.

Abstract: The present invention relates to a method of forming a thin film by depositing, in a vacuum, particles emitted from a film forming source (27) on a substrate (21). Specifically, the particles are deposited on the substrate (21) in a state where a movable endless belt (11) is disposed between the film forming source (27) and the substrate (21) so that a film forming area DA is defined on a surface of the substrate (21) by the endless belt (11), whose moving path has a forward path and a return path that are formed between the film forming source (27) and the substrate (21). Typically, the substrate (21) is an elongated substrate having flexibility. The particles are deposited on the substrate (21) that is being transferred from a feed roller (23) to a take-up roller (26).

Abstract: A negative electrode for a lithium ion secondary battery of the present invention includes a current collector and an active material layer carried on the current collector. The active material layer contains silicon and oxygen. In the thickness direction of the active material layer, an oxygen ratio of the active material is greater at the side of the active material layer in contact with the current collector than at the side of the active material layer not in contact with the current collector. The active material layer contains no binder. By using the negative electrode described above, it is possible to provide a high capacity lithium ion secondary battery having superior high rate charge/discharge characteristics and excellent cycle characteristics.

Abstract: A non-aqueous electrolyte secondary battery having both high capacity and long-life is provided by solving the problem of the large irreversible capacity of a negative electrode active material. The non-aqueous electrolyte secondary battery is produced by a method including the steps of: reacting lithium with a negative electrode active material by bringing a metal film that is composed mainly of lithium into contact with a surface of a negative electrode active material layer; and thereafter combining the negative electrode with a positive electrode to form an electrode assembly. The metal film composed mainly of lithium is preferably formed on a carrier that does not chemically react with lithium, and the metal film on the carrier is preferably brought into contact with the negative electrode active material layer while heating and applying a pressure thereto.

Abstract: A band-shaped laminate having a flexible elongated substrate, a negative collector, a solid electrolyte, a positive active material, and a positive collector in this order is wound in a plate shape with the flexible elongated substrate placed inside. The band-shaped laminate that is laminated in a particular order is wound with the substrate placed inside, whereby a short-circuit occurrence ratio can be decreased. Furthermore, the band-shaped laminate includes the solid electrolyte, and is wound in a plate shape, whereby the reduction in thickness and the increase in volumetric energy density can be achieved.

Abstract: The present invention provides a thin film manufacturing method for improving a production volume by predicting expansion of a hole defect or a crack on a substrate and preventing the substrate from tearing.

Abstract: A production method of an electrode for a lithium-ion secondary battery includes: (A) a step of providing a current collector 11 having a plurality of bumps 12 on a surface thereof; (B) a step of allowing an evaporated source material to strike from a direction E which is tilted with respect to the normal of the surface of the current collector 11 to form a corresponding plurality of pillar-like members 14 on the plurality of bumps 12; and (C) a step of oxidizing the plurality of pillar-like members 14 to form a plurality of active material members 18 containing an oxide of the source material.

Abstract: The present invention provides a vacuum deposition apparatus configured to simultaneously form a power collecting lead forming portion and an electrode active material portion of a lithium-ion secondary battery and having excellent mass productivity. With shutters 12a and 12b closed, a substrate 4 winding around a first roll 3 is unroll to be conveyed to a second roll 8, and the substrate 4 stops when it reaches first and second deposition possible regions 60a and 60b. Here, the shutter 12a opens, and a deposition material in a crucible of an evaporation source 9 is evaporated to be supplied to a surface of the substrate 4 which is located in the first deposition possible region 60a. With this, a first layer is formed as a deposited film on the surface of the substrate 4. After the deposition is carried out with respect to the substrate 4 for a predetermined period of time, the shutter 12a is closed.

Abstract: Includes the steps of preparing a sheet-like current collector 4 having a plurality of bumps 4A on a surface thereof, the plurality of bumps having a height of 3 ?m or greater and 10 ?m or less; and forming an active material body having a stacked structure on each of the bumps 4A of the current collector 4.

Abstract: An electrode plate for a battery includes a current collector having a substrate and a plurality of protrusions that are carried on the substrate; and an active material layer that is carried on the current collector. The protrusions include a conductive material that undergoes plastic deformation more easily than the substrate. A lithium secondary battery includes the above electrode plate.

Abstract: An electrode for a non-aqueous electrolyte secondary battery 6 according to the present invention includes: a current collector 3; a first active material layer 2 formed on the current collector 3; and a second active material layer 5 provided on the first active material layer 2, the second active material layer 5 including a plurality of active material particles 4. The plurality of active material particles 4 is mainly of a chemical composition represented as SiOx (0?x<1.2). The first active material layer 2 is mainly of a chemical composition represented as SiOy (1.0?y<2.0, y>x). The area in which the first active material layer 2 is in contact with the plurality of active material particles 4 is smaller than the area in which the current collector 3 is in contact with the first active material layer 2.

Abstract: A negative electrode for a lithium ion secondary battery including a current collector and an active material layer carried on the current collector, wherein the active material layer includes a first layer and a second layer alternately laminated in a thickness direction of the active material layer, and wherein the first layer includes silicon or silicon and a small amount of oxygen and the second layer includes silicon and a larger amount of oxygen than the first layer. With the use of the negative electrode, it is possible to provide a high capacity lithium ion secondary battery having excellent high rate charge/discharge characteristics and superior cycle characteristics.

Abstract: To provide a thin film forming apparatus capable of uniformly and adequately cooling down a substrate. The thin film forming apparatus of the present invention forms a thin film on an elongated substrate in vacuum and includes: a cooling body 1 provided close to a rear surface of the substrate being transferred at an opening 31; a gas introducing unit configured to introduce a gas to between the cooling body 1 and the substrate 21; and a substrate holding unit 3 configured to hold vicinities of both width-direction ends of the substrate traveling at the opening 31.

Abstract: In a film forming method using gas cooling, a decrease in a film formation rate and an excessive load on a vacuum pump due to the introduction of the gas are avoided while achieving an adequate cooling effect. A thin film forming apparatus of the present invention includes: a cooling body 10 provided close to a rear surface of a substrate 7 in a thin film forming region 14; a gas introducing unit configured to for introduce a gas to between the cooling body 10 and the rear surface of the substrate 7; and a gap maintaining unit 11 contacting the rear surface of the substrate 7 for dividing the thin film forming region 14 into a first thin film forming region 14a and a second thin film forming region 14b where a film forming speed is lower than that in the first thin film forming region 14a, and maintaining a gap between the cooling body 10 and the substrate 7.

Abstract: A negative active material thin film provided on a collector layer directly or via an underlying layer has a multi-layered configuration including at least two silicon thin films containing silicon as a main component. Because of this, even when the thickness of the negative active material thin film is increased, the increase in thickness of one silicon thin film can be prevented by increasing the number of silicon thin films. Thus, the diameter of silicon particles substantially in an inverse truncated cone shape is not enlarged in the silicon thin film. Accordingly, in an energy device having a thin film mainly containing silicon as a negative active material, even when the thickness of the negative active material layer is increased to obtain a larger capacity, cycle characteristics are not degraded.

Abstract: An electrode for a non-aqueous electrolyte secondary battery 6 according to the present invention includes: a current collector 3; a first active material layer 2 formed on the current collector 3; and a second active material layer 5 provided on the first active material layer 2, the second active material layer 5 including a plurality of active material particles 4. The plurality of active material particles 4 is mainly of a chemical composition represented as SiOx (0?x<1.2). The first active material layer 2 is mainly of a chemical composition represented as SiOy (1.0?y<2.0, y>x). The area in which the first active material layer 2 is in contact with the plurality of active material particles 4 is smaller than the area in which the current collector 3 is in contact with the first active material layer 2.

Abstract: The present invention provides a film forming method and a film forming apparatus each of which is capable of forming films at low cost. The film forming method of the present invention includes the steps of (i) melting a solid material 51 of a thin film to prepare a melted liquid, solidifying the melted liquid 51a to form a rod-shaped body 51b, and pulling out the rod-shaped body 51b, (ii) melting and supplying a part of the rod-shaped body 51b to a melted liquid (evaporation source) 51d, and (iii) using the melted liquid (evaporation source) 51d to form the thin film. The steps (i), (ii), and (iii) are carried out in vacuum.