Abstract: For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8, data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10, by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11, communication abnormality is detected.

Abstract: A method controls an apparatus such as a semiconductor-processing apparatus including a controller and at least one device controlled by the controller, wherein the controller is provided with an interface for communicating with the device, and the interface has an internal clock for measuring time intervals for the communication. The method includes: replacing a system clock of the controller's operating system, which is used for transmitting instructions to the interface, with the internal clock of the interface; transmitting instructions to the interface from the controller using the time intervals measured by the internal clock substituting the system clock; and transmitting the instructions to the device from the interface using the time intervals measured by the internal clock in the interface, thereby controlling the device.

Abstract: A method controls an apparatus such as a semiconductor-processing apparatus including a controller and at least one device controlled by the controller, wherein the controller is provided with an interface for communicating with the device, and the interface has an internal clock for measuring time intervals for the communication. The method includes: replacing a system clock of the controller's operating system, which is used for transmitting instructions to the interface, with the internal clock of the interface; transmitting instructions to the interface from the controller using the time intervals measured by the internal clock substituting the system clock; and transmitting the instructions to the device from the interface using the time intervals measured by the internal clock in the interface, thereby controlling the device.

Abstract: A recipe operation system includes (i) at least one recipe comprised of multiple operation steps arranged in order; and (ii) a recipe execution program including a subroutine which is called every time steps are changed, to select a next step to be executed from the steps arranged in order. The steps are executed in order different from the arranged order, and at least one step is repeated.

Abstract: For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8, data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10, by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11, communication abnormality is detected.