Abstract: Methods and apparatuses for filling an epitaxial layer into a trench/via/structure formed in a substrate with good deposition profile control and film uniformity across the substrate are provided In one embodiment, a method of depositing a epitaxial layer on the substrate includes supplying a gas mixture having a first ratio of a dichlorosilane gas to a chlorine containing gas into the processing chamber, altering the gas mixture to have a second ratio of the dichlorosilane gas to the chlorine containing gas into the processing chamber, maintaining a substrate temperature of between about 600 degrees Celsius and about 1000 degrees Celsius, and filling an opening formed in a substrate.

Abstract: Methods and apparatuses for filling an epitaxial layer into a trench/via/structure formed in a substrate with good deposition profile control and film uniformity across the substrate are provided. In one embodiment, a method of depositing a epitaxial layer on the substrate includes supplying a gas mixture having a first ratio of a dichlorosilane gas to a chlorine containing gas into the processing chamber, altering the gas mixture to have a second ratio of the dichlorosilane gas to the chlorine containing gas into the processing chamber, maintaining a substrate temperature of between about 600 degrees Celsius and about 1000 degrees Celsius, and filling an opening formed in a substrate.

Abstract: A recording medium support device includes the following elements. A feed tray is capable of receiving stacked recording media. A recording medium support is pivotably connected to the feed tray. The support is switchable between a closing position and an opening position by pivoting. An anti-falling section prevents the recording medium support from falling to the closing position by coming into contact with the base of the recording medium support in the opening position.

Abstract: A first ratchet claw and a second ratchet claw are formed on a lock member which is provided in a reciprocating manner with respect to a guide member, wherein a plurality of first and second ratchet recesses for being fitted to the first and second ratchet claw and the first and second ratchet claw are provided on the guide member along a sliding direction of the guide member, and wherein when a lever member which is slidably provided on the guide member is in the unlocked position, the first and second ratchet recesses are continuously formed along a sliding direction of the guide member arranged in an relationship in which at least one of the first and second ratchet recess does not face the first ratchet claw in the case of the first ratchet recess or the second ratchet claw in the case of the second ratchet recess.

Abstract: A first ratchet claw and a second ratchet claw are formed on a lock member which is provided in a reciprocating manner with respect to a guide member, wherein a plurality of first and second ratchet recesses for being fitted to the first and second ratchet claw and the first and second ratchet claw are provided on the guide member along a sliding direction of the guide member, and wherein when a lever member which is slidably provided on the guide member is in the unlocked position, the first and second ratchet recesses are continuously formed along a sliding direction of the guide member arranged in an relationship in which at least one of the first and second ratchet recess does not face the first ratchet claw in the case of the first ratchet recess or the second ratchet claw in the case of the second ratchet recess.

Abstract: [Object] To provide a tilt device which has less possibility of deterioration of a load applying portion with time and has durability for a long time use. [Solving Means] There are provided a tilting member 10 being capable of tilting with respect to a hinged end 11 and assuming a first posture and a second posture; a supporting members 4, 9 that support the tilting member 10 in a tiltable state; a load applying portion 20 provided between the tilting member 10 and the supporting members 4, 9 for applying a tilting load in a state in which the tilting member is positioned between the first posture and the second posture, and not applying the tilting load to the tilting member 10 when the tilting member 10 is positioned at least one of the first posture position and the second posture position.

Abstract: A recording medium support device includes the following elements. A feed tray is capable of receiving stacked recording media. A recording medium support is pivotably connected to the feed tray. The support is switchable between a closing position and an opening position by pivoting. An anti-falling section prevents the recording medium support from falling to the closing position by coming into contact with the base of the recording medium support in the opening position.