Abstract: Described herein is a technique capable of improving the controllability of firm thickness distribution. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber; a first and a second gas supply system; an exhaust system; and a controller for controlling the first and the second gas supply system and the exhaust system to form a film. The first gas supply system includes: a first and a second storage part; a first gas supply port for supplying a gas stored in the first storage part from an outer periphery toward a center of a substrate; and a second gas supply for supplying the gas stored in the second storage part from the outer periphery along a direction more inclined toward the outer periphery than a direction from the outer periphery toward the center of the substrate.

Abstract: A vehicle is provided of which the four wheels are steerable, and which is prevented from unexpectedly moving forward or backward when switching the travel mode. The vehicle includes a steering device for front right and front left wheels of the vehicle capable of steering the front right and front left wheels, respectively, in one and the other of the right and left directions, a steering device for rear right and rear left wheels of the vehicle configured, simultaneously when the steering device for the front right and front left wheels are actuated, to be capable of steering the rear right and rear left wheels in the other and the one of the right and left directions, respectively, and in-wheel motors provided in at least one of each of the front right and front left wheels and each of the rear right and rear left wheels.

Abstract: A vehicle includes steering devices configured to change a travel state of the vehicle between a normal travel mode and a special travel mode by steering right and left wheels in right and left opposite directions; a display device; and a processor configured to calculate an angle difference between the angle of each of the right and left wheels in either one of the normal travel mode and the special travel mode, and the current angle of each of the right and left wheels, which have been steered by the steering devices. The processor is further configured to display, on the display device, information necessary for a driver to steer the right and left wheels based on the angle difference.

Abstract: A method of controlling a steering device including a pair of rack bars capable of steering right and left wheels in one and/or the other of opposite right and left directions, and a coupling mechanism which moves the rack bars in the right direction and/or the left direction by the same distance. The method includes issuing a command to couple or uncouple the coupling mechanism, and driving at least one of an engaging part and a receiving part of the coupling mechanism relative to the other if a coupling state sensor are unable to detect that the coupling mechanism has been coupled or uncoupled when a predetermined time has passed after issuing the command.

Abstract: A vehicle is provided of which the four wheels are steerable, and which is prevented from unexpectedly moving forward or backward when switching the travel mode. The vehicle includes a steering device for front right and front left wheels of the vehicle capable of steering the front right and front left wheels, respectively, in one and the other of the right and left directions, a steering device for rear right and rear left wheels of the vehicle configured, simultaneously when the steering device for the front right and front left wheels are actuated, to be capable of steering the rear right and rear left wheels in the other and the one of the right and left directions, respectively, and in-wheel motors provided in at least one of each of the front right and front left wheels and each of the rear right and rear left wheels.

Abstract: A piston rod position detecting mechanism is proposed which can detect continuously or in a multiple-point manner that the piston rod position has changed due to increase or decrease in the protruding amount of the piston rod due to aging. The protruding amount from a cylinder end wall is detected by a position detecting mechanism comprising a detecting coil housed in a bobbin provided at the cylinder end, a flange portion formed on the piston rod, and a coil spring. Also, an autotensioner and an electromagnetic valve with such a position detector are proposed. Further, a belt tension adjusting device is provided with a detector for detecting the position of a tension pulley which is pivotable with increase or decrease in the belt tension.

Abstract: A bearing provided with a rotation sensor comprises an outer ring, an inner ring and rolling elements, and a magnetic ring is engaged with the inner diametral surface of the outer ring. Thus, a highly reliable bearing provided with a rotation sensor exerting no bad influence on a magnetic sensor can be provided.

Abstract: A bearing provided with a rotation sensor comprises an outer ring, an inner ring and rolling elements, and a magnetic ring is engaged with the inner diametral surface of the outer ring. Thus, a highly reliable bearing provided with a rotation sensor exerting no bad influence on a magnetic sensor can be provided.

Abstract: A piston rod position detecting mechanism is proposed which can detect continuously or in a multiple-point manner that the piston rod position has changed due to increase or decrease in the protruding amount of the piston rod due to aging. The protruding amount from a cylinder end wall is detected by a position detecting mechanism comprising a detecting coil housed in a bobbin provided at the cylinder end, a flange portion formed on the piston rod, and a coil spring. Also, an autotensioner and an electromagnetic valve with such a position detector are proposed. Further, a belt tension adjusting device is provided with a detector for detecting the position of a tension pulley which is pivotable with increase or decrease in the belt tension.

Abstract: A piston rod position detecting mechanism is proposed which can detect continuously or in a multiple-point manner that the piston rod position has changed due to increase or decrease in the protruding amount of the piston rod due to aging. The protruding amount from a cylinder end wall is detected by a position detecting mechanism comprising a detecting coil housed in a bobbin provided at the cylinder end, a flange portion formed on the piston rod, and a coil spring. Also, an autotensioner and an electromagnetic valve with such a position detector are proposed. Further, a belt tension adjusting device is provided with a detector for detecting the position of a tension pulley which is pivotable with increase or decrease in the belt tension.

Abstract: A magnetization yoke having an exciting coil wound thereon is arranged to hold a magnetic member and a metal ring so that a magnetic flux passes through and magnetizes the magnetic member in the portion held by the magnetization yoke for successively magnetizing the magnetic member along the circumferential direction thereby multipolarly magnetizing the magnetic member in the circumferential direction. Thus, a magnetic encoder having large magnetization strength and a small magnetization pitch error, a wheel bearing employing the same and a method of manufacturing a magnetic encoder can be obtained.

Abstract: A semiconductor device fabrication process includes forming a Schottky layer, a cap layer covering the surface of the Schottky layer, and a Schottky electrode of a two-level structure having a lower portion that penetrates through the cap layer and reaches the Schottky layer, and having an upper portion larger than the lower portion in cross-sectional area and that overlies the cap layer. With this construction, surface defects are unlikely to occur, so that a highly reliable semiconductor device can be fabricated.

Abstract: A method of fabricating an integrated circuit of which a bonding condition can be evaluated simply is provided. Two external connecting electrodes are provided on the surface, via holes are formed below them, and conductive portions are formed in the via holes. Then, a first metal film is formed on a rear face of a chip and a second metal film is formed on a surface of a ceramic substrate, and then both of them are made contact and heated so as to bond the chip and the ceramic substrate. Further, when the first metal film is formed, a slit portion which no first metal film exists is provided. When the bonding condition is evaluated, a resistance between two external connecting electrodes is measured.

Abstract: A bearing provided with a rotation sensor comprises an outer ring, an inner ring and rolling elements, and a magnetic ring is engaged with the inner diametral surface of the outer ring. Thus, a highly reliable bearing provided with a rotation sensor exerting no bad influence on a magnetic sensor can be provided.

Abstract: A semiconductor device according to the invention comprises a Schottky layer, a cap layer covering the surface of the Schottky layer, and a Schottky electrode of a two-level structure, having an under structure penetrating through the cap layer and reaching the Schottky layer, and an upper structure larger than the under structure in a cross-sectional area and overlying the cap layer. With such a construction as described, surface defect is unlikely to occur, and therefore, a highly reliable semiconductor device can be fabricated.

Abstract: A magnetization yoke having an exciting coil wound thereon is arranged to hold a magnetic member and a metal ring so that a magnetic flux passes through and magnetizes the magnetic member in the portion held by the magnetization yoke for successively magnetizing the magnetic member along the circumferential direction thereby multipolarly magnetizing the magnetic member in the circumferential direction. Thus, a magnetic encoder having large magnetization strength and a small magnetization pitch error, a wheel bearing employing the same and a method of manufacturing a magnetic encoder can be obtained.

Abstract: A semiconductor device includes a Schottky layer, a cap layer covering the surface of the Schottky layer, and a Schottky electrode of a two-level structure. The Schottky electrode has a lower portion that penetrates through the cap layer and reaches the Schottky layer, and has an upper portion larger than the lower portion in cross-sectional area and that overlies the cap layer. With this construction, surface defects are unlikely to occur, so that a highly reliable semiconductor device can be fabricated.

Abstract: A method of fabricating an integrated circuit of which a bonding condition can be evaluated simply is provided. Two external connecting electrodes are provided on the surface, via holes are formed below them, and conductive portions are formed in the via holes. Then, a first metal film is formed on a rear face of a chip and a second metal film is formed on a surface of a ceramic substrate, and then both of them are made contact and heated so as to bond the chip and the ceramic substrate. Further, when the first metal film is formed, a slit portion which no first metal film exists is provided. When the bonding condition is evaluated, a resistance between two external connecting electrodes is measured.

Abstract: A method of fabricating an integrated circuit of which a bonding condition can be evaluated simply is provided. Two external connecting electrodes are provided on the surface, via holes are formed below them, and conductive portions are formed in the via holes. Then, a first metal film is formed on a rear face of a chip and a second metal film is formed on a surface of a ceramic substrate, and then both of them are made contact and heated so as to bond the chip and the ceramic substrate. Further, when the first metal film is formed, a slit portion which no first metal film exists is provided. When the bonding condition is evaluated, a resistance between two external connecting electrodes is measured.

Abstract: FET gate bias voltage application circuits and semiconductor apparatuses in which such a FET gate bias voltage application circuit is installed compensate for adverse effects caused by changes in the surrounding temperature. A temperature compensation FET is installed in a FET gate bias voltage application circuit in which a divided voltage is applied to the gate of a controlled FET from a first intermediate point of a resistance type potential dividing circuit to which a direct current voltage is applied. This temperature compensation FET becomes conductive at a gate voltage higher than the gate voltage of the controlled FET. A voltage divided at the first intermediate point is applied to the gate of this temperature compensation FET. The drain of this temperature compensation FET is connected to a second intermediate point at which the electric potential is higher than the electric potential at the first intermediate point. The source of this temperature compensation FET is grounded.