Abstract: A column jacket includes an inner jacket and an outer jacket formed with a slit and elastically reducible in diameter. A clamp mechanism causes the outer jacket to clamp the inner jacket so that the inner jacket is unable to move in an axial direction X by clamping a pair of clamp target portions of the outer jacket. The slit extends from an open end formed at a jacket end of the outer jacket to a closed end located at a predetermined position of the outer jacket in the axial direction. The slit includes a meandering portion that meanders in a wave-like manner in a circumferential direction between the open end and the closed end.

Abstract: A method of correcting a scanning electron microscope using a detection sample for producing light of an intensity corresponding to an electron density of an electron beam irradiating a surface of the detection sample. Precise correction of the scanning electron microscope is performed on the basis of the intensity of the light generated on the detection sample.

Abstract: A scanning electron microscope correction method using a detection sample for producing light of an intensity corresponding to an electron density of an electron beam irradiated onto a surface of the detection sample, and performing correction relating to the scanning electron microscope on the basis of the intensity of the light generated on the detection sample, is provided in order for precise correction.