Abstract: A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

Abstract: A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).

Abstract: A component mounting system includes a board transport line for transporting a board from an upstream to a downstream and a work station disposed in the board transport line and performing component mounting work. The board transport line transports a board introduced in the downstream of the work station to the work station, and transports the board from the work station to the downstream when mounting of a component on the board is completed in the work station.

Abstract: A component mounting system includes a board transport line for transporting a board from an upstream to a downstream and a work station disposed in the board transport line and performing component mounting work. The board transport line transports a board introduced in the downstream of the work station to the work station, and transports the board from the work station to the downstream when mounting of a component on the board is completed in the work station.

Abstract: Various means for detecting the load on the bottom of a bed are proposed, but they have various problems, since the load sensor is provided separately from a bed or installed outside a bed. This invention solves the abovementioned problems by a load sensor-containing actuator in which one end side of a screw shaft 1 is rotatably supported by a base body 2; a female threaded member 3 is engaged with the screw shaft; and an actuation rod body 4 fixed to the female threaded member can advance and retreat in the axial direction of the screw shaft, wherein the base body is provided with a thrust bearing 6 coaxially with the screw shaft and an actuation cylinder 7 supporting the one end side of the screw shaft in the axial direction via the thrust bearing; a detection cylinder 9 is provided between the actuation cylinder and a support member 8 for the base body; and a strain gauge 10 is attached to the outside surface of the detection cylinder.

Abstract: Various means for detecting the load on the bottom of a bed are proposed, but they have various problems, since the load sensor is provided separately from a bed or installed outside a bed. This invention solves the abovementioned problems by a load sensor-containing actuator in which one end side of a screw shaft 1 is rotatably supported by a base body 2; a female threaded member 3 is engaged with the screw shaft; and an actuation rod body 4 fixed to the female threaded member can advance and retreat in the axial direction of the screw shaft, wherein the base body is provided with a thrust bearing 6 coaxially with the screw shaft and an actuation cylinder 7 supporting the one end side of the screw shaft in the axial direction via the thrust bearing; a detection cylinder 9 is provided between the actuation cylinder and a support member 8 for the base body; and a strain gauge 10 is attached to the outside surface of the detection cylinder.