Abstract: A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a chamber isolation valve and/or isolation valve door while avoiding metal-to-metal contact between moving parts in the processing system. In one embodiment, the elastomeric member is attached to and in electrical communication with the door of the chamber isolation valve. The elastomeric member is brought into contact with a grounded component of the plasma processing system when the door is in the closed position. In another embodiment, the conductive elastomeric member is attached to a bracing member of the isolation valve and is brought into contact with a grounded component of the plasma processing system when the bracing member is deployed to hold the isolation valve door in place during substrate processing. Other configurations are also provided.

Abstract: In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a second opening formed in the second wall. The slit valve also includes a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall. The slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall. Numerous other aspects are provided.

Abstract: A method for the preparation of organic chelates utilized as ingredients of animal feedstuffs. The organic chelates are passed to the intestines of livestock without decomposition in the stomach, and thereby have a high absorption rate. The present invention provides a preparation method of perfect chelate minerals having a high yield and containing copper, zinc, iron, manganese, or cobalt. The organic chelate mineral is prepared by precipitating metal sulfates or chlorides with sodium hydroxide or potassium hydroxide in a solution of two equivalents of an amino acid completely dissolved at above 70° C., collecting metal hydroxide by removing sodium sulfate, potassium sulfate, sodium chloride or potassium chloride through filtering, dissolving the metal hydroxide by adding the equivalent weights of hydrochloric acid, and then neutralizing the hydrochloric acid added for dissolving metal hydroxide.