Patents by Inventor Ke Lu HUA

Ke Lu HUA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor structure and fabrication method thereof
    Patent number: 10319839
    Abstract: A semiconductor structure and a method for fabricating a semiconductor structure are provided. The method includes forming one or more fins on a substrate, wherein each fin includes a first sidewall and a second sidewall opposing each other. The method also includes forming a sacrificial layer over the fin. Further, the method also includes performing a first ion implantation process on the first sidewall and a top of the fin, and performing a second ion implantation process on the second sidewall and the top of the fin.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: June 11, 2019
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Zhong Shan Hong, Ke Lu Hua, Jin Peng
  • SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF
    Publication number: 20170345916
    Abstract: A semiconductor structure and a method for fabricating a semiconductor structure are provided. The method includes forming one or more fins on a substrate, wherein each fin includes a first sidewall and a second sidewall opposing each other. The method also includes forming a sacrificial layer over the fin. Further, the method also includes performing a first ion implantation process on the first sidewall and a top of the fin, and performing a second ion implantation process on the second sidewall and the top of the fin.
    Type: Application
    Filed: March 30, 2017
    Publication date: November 30, 2017
    Inventors: Zhong Shan HONG, Ke Lu HUA, Jin PENG