Abstract: Gas delivery systems for delivering gaseous precursors sublimated from solid form are disclosed herein. In some embodiments, the gas delivery system may include an ampoule to hold a solid precursor that can sublimate to a gaseous form within the ampoule; and a carrier gas line coupled to the ampoule at a junction disposed in the carrier gas line, wherein the carrier gas line has a first cross-sectional area proximate an inlet and an outlet of the junction and a smaller, second cross-sectional area within the junction, and wherein a carrier gas flowing through the junction creates a pressure within in the junction that is less than a pressure within the ampoule.

Abstract: Embodiments of gas delivery systems for providing process gases sublimated from a solid precursor are provided herein. In some embodiments, a gas delivery system includes an ampoule to hold a solid precursor; a conduit coupled to the ampoule and configured to selectively deliver a sublimated process gas from the solid precursor to a process chamber or an exhaust system; and a flow restrictor disposed in the conduit between the ampoule and the exhaust system.