Abstract: The present invention relates to a breast cancer diagnosis device. More particularly, the present invention relates to a breast cancer diagnosis device for early detection of the presence or absence of breast cancer lesions inside the breast of a diagnosis subject. The breast cancer diagnosis device includes: an X-ray diagnosis unit generating an X-ray image of a diagnosis subject; an optical diagnosis unit generating an optical transmission image of the diagnosis subject; and a transfer unit which is coupled to the X-ray diagnosis unit and the optical diagnosis unit to transfer all or part of the X-ray diagnosis unit and the optical diagnosis unit, and sequentially transfer all or part of the X-ray diagnosis unit or the optical diagnosis unit toward the diagnosis subject.

Abstract: A display apparatus and a display method are provided. The display apparatus includes a display configured to display a multi-window screen image comprising windows. The display apparatus further includes an audio output interface, and a controller configured to detect a movement of focus from a window to another window among the windows, analyze a stream of content that is reproduced in the focused other window, in response to the controller detecting the movement of focus, and control the audio output interface to output audio data based on the analysis.

Abstract: The present invention relates to a breast cancer diagnosis device. More particularly, the present invention relates to a breast cancer diagnosis device for early detection of the presence or absence of breast cancer lesions inside the breast of a diagnosis subject. The breast cancer diagnosis device includes: an X-ray diagnosis unit generating an X-ray image of a diagnosis subject; an optical diagnosis unit generating an optical transmission image of the diagnosis subject; and a transfer unit which is coupled to the X-ray diagnosis unit and the optical diagnosis unit to transfer all or part of the X-ray diagnosis unit and the optical diagnosis unit, and sequentially transfer all or part of the X-ray diagnosis unit or the optical diagnosis unit toward the diagnosis subject.

Abstract: A display apparatus and a display method are provided. The display apparatus includes a display configured to display a multi-window screen image comprising windows. The display apparatus further includes an audio output interface, and a controller configured to detect a movement of focus from a window to another window among the windows, analyze a stream of content that is reproduced in the focused other window, in response to the controller detecting the movement of focus, and control the audio output interface to output audio data based on the analysis.

Abstract: An endpoint detection device, a plasma reactor with the endpoint detection device, and an endpoint detection method are provided. The endpoint detection device includes an OES data operation unit, a data selector, a product generator, an SVM, and an endpoint determiner. The OES data operation unit processes reference OES data by normalization and PCA. The data selector selects part of the linear reference loading vectors and selects part of the selected linear reference loading vectors. The product generator outputs at least one reference product value. The SVM performs regression and outputs a prediction product value. The endpoint determiner detects a process wafer etch or deposition endpoint and outputs a detection signal.

Abstract: An endpoint detection device, a plasma reactor with the endpoint detection device, and an endpoint detection method are provided. The endpoint detection device includes an OES data operation unit, a data selector, a product generator, an SVM, and an endpoint determiner. The OES data operation unit processes reference OES data by normalization and PCA. The data selector selects part of the linear reference loading vectors and selects part of the selected linear reference loading vectors. The product generator outputs at least one reference product value. The SVM performs regression and outputs a prediction product value. The endpoint determiner detects a process wafer etch or deposition endpoint and outputs a detection signal.

Abstract: An endpoint detection device, a plasma reactor with the endpoint detection device, and an endpoint detection method are provided. The endpoint detection device includes an OES data operation unit, a data selector, a product generator, an SVM, and an endpoint determiner. The OES data operation unit processes reference OES data by normalization and PCA. The data selector selects part of the linear reference loading vectors and selects part of the selected linear reference loading vectors. The product generator outputs at least one reference product value. The SVM performs regression and outputs a prediction product value. The endpoint determiner detects a process wafer etch or deposition endpoint and outputs a detection signal.

Abstract: An endpoint detection device, a plasma reactor with the endpoint detection device, and an endpoint detection method are provided. The endpoint detection device includes an OES data operation unit, a data selector, a product generator, an SVM, and an endpoint determiner. The OES data operation unit processes reference OES data by normalization and PCA. The data selector selects part of the linear reference loading vectors and selects part of the selected linear reference loading vectors. The product generator outputs at least one reference product value. The SVM performs regression and outputs a prediction product value. The endpoint determiner detects a process wafer etch or deposition endpoint and outputs a detection signal.

Abstract: An etching gas control system is provided. The system includes a gas injector, a gas supply pipe, a Flow Ratio Controller (FRC), and a gas supply unit. The gas injector is installed in a chamber and supplies gas inside the chamber. The gas injector includes a top injector installed at a top of the chamber and a side injector installed at a side of the chamber. The gas supply pipe connects and supplies gas to the gas injector. The FRC connects to the gas supply pipe and controls supply of gas. The gas supply unit supplies gas to the FRC.