Abstract: The present disclosure concerns a spectrometer (10) and method for generating a two dimensional spectrum (S). The spectrometer (10) comprises a main grating (3) and cross dispersion element (2). An imaging mirror (4) is arranged for reflecting and focussing dispersed radiation (R3) from the main grating (3) towards an image plane (IP) for imaging the two dimensional spectrum (S) onto an image plane (IP) of the spectrometer (10). A correction lens (6) is arranged for correcting optical aberrations in the imaging of the two dimensional spectrum (S) in the image plane (IP). The imaging mirror (4) and correction lens (6) have a coinciding axis of cylindrical symmetry (AS).

Abstract: The present disclosure concerns a spectrometer (10) and method for generating a two dimensional spectrum (S). The spectrometer (10) comprises a main grating (3) and cross dispersion element (2). An imaging mirror (4) is arranged for reflecting and focussing dispersed radiation (R3) from the main grating (3) towards an image plane (IP) for imaging the two dimensional spectrum (S) onto an image plane (IP) of the spectrometer (10). A correction lens (6) is arranged for correcting optical aberrations in the imaging of the two dimensional spectrum (S) in the image plane (IP). The imaging mirror (4) and correction lens (6) have a coinciding axis of cylindrical symmetry (AS).

Abstract: According to an aspect of the invention, there is provided a chip die 2 manipulator apparatus arranged for picking and placing of a chip die 2 in a chip manufacturing process, wherein an imaging system 11 comprising an arc form convex spherical mirror 13 arranged at a second off-axis position B and centered relative to the center position 5; a folding mirror 4 arranged in a light path between the convex spherical mirror 13 and the center position 5 for folding the light path to a third off-axis position C; and an arc form concave spherical mirror 15 arranged at the third off-axis position C having a curvature to image from at least one of the center position 5 and the component 2 on the image detection system 9. The imaging system 11 corrects for the angled image detection of the center position 5.

Abstract: The optical probe contains a monolithic body of optically transparent material to perform focusing for a plurality of parallel light paths from one or more fibers to one or more object points. Surface parts of the monolithic body are curved to form lenses and/or coated with a reflective coating. On a fiber side of the monolithic body an opening or openings are provided in a reflective coating opposite the tip or tips of the fibers to pass light. On the object side of the monolithic body, a coated surface part reflects the light path from the openings back to the fiber side of the monolithic body, from where the light path is reflected towards an aperture on the object side. At least part of the reflecting surfaces is curved to form reflector a plurality of distinct lenses on the same side of the monolithic body.

Abstract: According to an aspect of the invention, there is provided a chip die 2 manipulator apparatus arranged for picking and placing of a chip die 2 in a chip manufacturing process, wherein an imaging system 11 comprising an arc form convex spherical mirror 13 arranged at a second off-axis position B and centered relative to the centre position 5; a folding mirror 4 arranged in a light path between the convex spherical mirror 13 and the centre position 5 for folding the light path to a third off-axis position C; and an arc form concave spherical mirror 15 arranged at the third off-axis position C having a curvature to image from at least one of the centre position 5 and the component 2 on the image detection system 9. The imaging system 11 corrects for the angled image detection of the centre position 5.

Abstract: A lithographic apparatus transfers a pattern from a patterning device onto a substrate and includes a projection system to project a patterned radiation beam onto the substrate; a controllable actuator to adjust a distance between the projection system and the substrate; and a particle detector system to detect a particle on a surface of the substrate. The particle detector system has illumination optics directing the radiation to a detection area of the surface of the substrate, detection optics receiving radiation from the detection area of the surface of the substrate, and a detector coupled to the detection optics to produce a measurement signal. The apparatus further has a processing system to determine the height of a particle from the measurement signal, generate a height excess signal if the height exceeds a threshold value, and control the actuator in response to the height excess signal.

Abstract: Method for a visual measurement, in which an image sector of an image with a target object is presented to an eye of an operative by a display unit, and in which the fovea of the eye is placed into such a reference position relative to the display unit, or the image sector is shifted in such a way towards the periphery relative to the fovea of the eye in a reference position, that the target object lies outside the fovea and the operative decides whether the target object is still visible, and the extent to which the target object is situated outside the reference position is determined.

Abstract: A motion picture projector, camera, and film for a panoramic motion picture. The projector advances a film strip along a cylindrical path for the projection of a panoramic image. Substantially identical condenser lenses with light sources are mounted inside the cylindrical film path aligned with and connected to projection lenses outside the cylindrical path. The condensers and projection lenses are rotated together at a speed other than the speed of movement of the film. The ratio of the angular velocity of the film to the angular velocity of the projection lenses is n:(n-1), where n is the number of projection lenses. Each projection lens projects a section of the film that has a length of 360.degree./(n(n-1)). The film strip has n series of portions representing n sectors of the panoramic scene, the time sequential portions of one series having n-1 intervening portions of other series therebetween. A camera for producing the film is similar in layout to the projector.