Abstract: The instant disclosure discloses a semiconductor device comprising a substrate having a cell region; a device layer over the substrate; a plurality of capacitor lower electrodes over the device layer in the cell region, each of the capacitor lower electrodes has a U-shaped profile defining an inner surface in a cross section; a capacitor dielectric liner on the inner surfaces of the capacitor lower electrodes; and a SiGe layer over the capacitor dielectric liner, wherein the SiGe layer has a Ge concentration distribution that has a greatest value at a middle portion of the SiGe layer and decreases there-from upwardly and downwardly along a thickness direction.

Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a base layer and an etch stop layer having a plurality of elements and in physical contact with the base layer. The etch stop layer have a Boron (B) element configured to improve the etch profile of the etch stop layer.

Abstract: The instant disclosure discloses method comprising receiving a substrate; disposing a dielectric layer over the substrate; disposing a metallic material on the dielectric layer; disposing a passivation layer on top surface of the metallic material; and performing an alloy layer formation process to dispose a SiGe layer across top surface of the passivation layer.

Abstract: An apparatus for ion implantation is disclosed. The apparatus comprising an arc chamber and an electron source device. The electron source device includes a cathode and a filament. The filament is disposed within the cathode. The cathode has a body and a cap disposed over the body. The cap has a receiving surface and a emitting surface opposite the receiving surface. The emitting surface has a convex shape facing the receiving area of the arc chamber and the receiving surface has a conical shape where a center area is a flat surface and the center area being surrounded by a tapered sidewall.

Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a base layer and an etch stop layer having a plurality of elements and in physical contact with the base layer. The etch stop layer have a Boron (B) element configured to improve the etch profile of the etch stop layer.

Abstract: The instant disclosure discloses a semiconductor device comprising a substrate having a cell region; a device layer over the substrate; a plurality of capacitor lower electrodes over the device layer in the cell region, each of the capacitor lower electrodes has a U-shaped profile defining an inner surface in a cross section; a capacitor dielectric liner on the inner surfaces of the capacitor lower electrodes; and a SiGe layer over the capacitor dielectric liner, wherein the SiGe layer has a Ge concentration distribution that has a greatest value at a middle portion of the SiGe layer and decreases there-from upwardly and downwardly along a thickness direction.

Abstract: The instant disclosure discloses method comprising receiving a substrate; disposing a dielectric layer over the substrate; disposing a metallic material on the dielectric layer; disposing a passivation layer on top surface of the metallic material; and performing an alloy layer formation process to dispose a SiGe layer across top surface of the passivation layer.

Abstract: A method for manufacturing a semiconductor component includes the following steps: performing polysilicon deposition on a surface of a semiconductor substrate to form a deposited layer; performing a chemical mechanical polishing on the deposited layer; performing a hydrogen implantation treatment or a hydrogen plasma treatment on the deposited layer; and performing an annealing process on the deposited layer at an annealing temperature of 600 degrees Celsius to 900 degrees Celsius to form a polysilicon contact layer.