Abstract: A substrate processing method is provided, which includes: a sulfuric acid immersing step of immersing a plurality of substrates in a sulfuric acid-containing liquid within a sulfuric acid vessel; a transporting step of taking out the substrates from the sulfuric acid vessel and transporting the substrates to an ozone gas treatment unit; and an ozone exposing step of exposing the substrates transported to the ozone gas treatment unit to an ozone-containing gas. The ozone gas treatment unit may include a gas treatment chamber which accommodates the substrates. The ozone exposing step may include the step of placing the substrates taken out of the sulfuric acid vessel in a treatment space within the gas treatment chamber to expose the substrates to the ozone-containing gas.

Abstract: A substrate processing method for removing an organic film on a substrate includes a) carrying out introduction of ozone-containing gas into a substrate processing chamber to fill at least a space above the substrate in the substrate processing chamber with ozone-containing gas, b) starting spraying through the space a heated chemical liquid containing sulfuric acid onto the substrate after the a), c) continuing the spraying started in the b), and d) stopping the spraying continued in the c).

Abstract: An identification information transmitter encrypts identification information for identifying a person or an object using an encryption key, transmits the encrypted identification information, and, after receiving another encryption key, switches the encryption key from the encryption key to the other encryption key. A server receives the encrypted identification information from the identification information transmitter, determines whether the encryption key is to be switched, and, if the encryption key is to be switched, generates the other encryption key. Another server authenticates the identification information that an identification information receiver receives from the identification information transmitter, and, if authentication is successful, acquires the other encryption key from the server, and transmits the other encryption key to the identification information receiver.

Abstract: An identification information transmitter encrypts identification information for identifying a person or an object using an encryption key, transmits the encrypted identification information, and, after receiving another encryption key, switches the encryption key from the encryption key to the other encryption key. A server receives the encrypted identification information from the identification information transmitter, determines whether the encryption key is to be switched, and, if the encryption key is to be switched, generates the other encryption key. Another server authenticates the identification information that an identification information receiver receives from the identification information transmitter, and, if authentication is successful, acquires the other encryption key from the server, and transmits the other encryption key to the identification information receiver.