Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: A charged particle beam device suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface. The charged particle beam device includes the electrostatic chuck mechanism; a stage (200) which moves a sample, which is to be irradiated with a charged particle beam, relative to an irradiation position of the charged particle beam; an insulating body (203) which is disposed on the stage and constitutes a dielectric layer of the electrostatic chuck; a first support member (402) which supports the insulating body on the stage; a ring-shaped electrode (400) which encloses the surroundings of the sample and is installed on the insulating body in a contactless manner, and to which a predetermined voltage is applied; and a second support member (405) which supports the ring-shaped electrode.

Abstract: A charged particle beam device suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface. The charged particle beam device includes the electrostatic chuck mechanism; a stage (200) which moves a sample, which is to be irradiated with a charged particle beam, relative to an irradiation position of the charged particle beam; an insulating body (203) which is disposed on the stage and constitutes a dielectric layer of the electrostatic chuck; a first support member (402) which supports the insulating body on the stage; a ring-shaped electrode (400) which encloses the surroundings of the sample and is installed on the insulating body in a contactless manner, and to which a predetermined voltage is applied; and a second support member (405) which supports the ring-shaped electrode.

Abstract: The purpose of the present invention is to provide a charged particle beam device which suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface.

Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: The purpose of the present invention is to provide a charged particle beam device which suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface.

Abstract: A starter for cranking an internal combustion engine includes an electric motor, an output shaft, and a one-way clutch for transmitting a rotational torque of the electric motor to the output shaft. The one-way clutch is composed of a clutch-outer driven by the electric motor, a clutch-inner spline-coupled to the output shaft, and rollers disposed between the clutch-outer and the clutch-inner. A portion of the clutch-inner is utilized as an inner ring of a ball bearing rotatably supporting the clutch-inner. A ball-groove rotatably supporting the bearing balls and retaining lubricant therein is formed on the outer circumference of the clutch-inner. In this manner, an original inner ring of the ball bearing can be eliminated without adversely affecting the lubricating function.

Abstract: In a starter, a one-way clutch that transmits rotation of a motor to an output shaft has a clutch inner portion. The clutch inner portion has female helical splines in an inner periphery. Also, the clutch inner portion has a stopper at a front end of the female helical splines on the side opposite to the motor. The female helical splines engage with male helical splines formed on a rear end of the output shaft so that the output shaft is slidable in an axial direction. When the male helical splines of the output shaft are brought into contact with the stopper, relative rotation of the helical splines is restricted, thereby to stop the axial movement of the output shaft.

Abstract: A shock absorbing device 8 includes a transmitting section 81, first friction plates 82, second friction plates 83, and a dish spring 84. The transmitting section 81 is engaged with the inner cylindrical portion of the second friction plates 83 and also engaged with an outer cylindrical surface of an internal gear 42. The first friction plates 82 are stationarily fixed to an end portion 102a of a central housing. The second friction plates 83 are brought into frictional engagement with the first friction plates 82 under a resilient force applied from the dish spring 84. The first friction plates 82 and the second friction plates 83 are alternately laminated.

Abstract: A starter for cranking an internal combustion engine includes an electric motor, an output shaft, and a one-way clutch for transmitting a rotational torque of the electric motor to the output shaft. The one-way clutch is composed of a clutch-outer driven by the electric motor, a clutch-inner spline-coupled to the output shaft, and rollers disposed between the clutch-outer and the clutch-inner. A portion of the clutch-inner is utilized as an inner ring of a ball bearing rotatably supporting the clutch-inner. A ball-groove rotatably supporting the bearing balls and retaining lubricant therein is formed on the outer circumference of the clutch-inner. In this manner, an original inner ring of the ball bearing can be eliminated without adversely affecting the lubricating function.

Abstract: In a starter, a one-way clutch that transmits rotation of a motor to an output shaft has a clutch inner portion. The clutch inner portion has female helical splines in an inner periphery. Also, the clutch inner portion has a stopper at a front end of the female helical splines on the side opposite to the motor. The female helical splines engage with male helical splines formed on a rear end of the output shaft so that the output shaft is slidable in an axial direction. When the male helical splines of the output shaft are brought into contact with the stopper, relative rotation of the helical splines is restricted, thereby to stop the axial movement of the output shaft. Thereafter, the output shaft will not receive a thrust force. Accordingly, it is less likely that a front bearing supporting the output shaft and a front housing will receive a large load.

Abstract: A shock absorbing device 8 includes a transmitting section 81, first friction plates 82, second friction plates 83, and a dish spring 84. The transmitting section 81 is engaged with the inner cylindrical portion of the second friction plates 83 and also engaged with an outer cylindrical surface of an internal gear 42. The first friction plates 82 are stationarily fixed to an end portion 102a of a central housing. The second friction plates 83 are brought into frictional engagement with the first friction plates 82 under a resilient force applied from the dish spring 84. The first friction plates 82 and the second friction plates 83 are alternately laminated.