Patents by Inventor Keigo Toriumi

Keigo Toriumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate storage container and exposure apparatus
    Patent number: 9472430
    Abstract: Provided is a reticle storage container including an inner container 10 which can store a plurality of reticles 16 and an outer container 1 which covers the inner container 10. The outer container 1 is configured to include a gas nozzle 5 which can inject a predetermined gas. The same gas as the gas supplied into an exposure apparatus 20 is supplied to the gas nozzle 5. The gas injected into the reticle storage container is vented through a vent hole 14 installed to the inner container 10.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: October 18, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kohei Shibano, Osamu Tanaka, Keigo Toriumi
  • SUBSTRATE STORAGE CONTAINER AND EXPOSURE APPARATUS
    Publication number: 20140223757
    Abstract: Provided is a reticle storage container including an inner container 10 which can store a plurality of reticles 16 and an outer container 1 which covers the inner container 10. The outer container 1 is configured to include a gas nozzle 5 which can inject a predetermined gas. The same gas as the gas supplied into an exposure apparatus 20 is supplied to the gas nozzle 5. The gas injected into the reticle storage container is vented through a vent hole 14 installed to the inner container 10.
    Type: Application
    Filed: August 7, 2013
    Publication date: August 14, 2014
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Kohei SHIBANO, Osamu Tanaka, Keigo Toriumi