Abstract: In the present invention, a charge transfer unit is arranged on a first-plane side of a thinly-formed semiconductor base. Charge accumulating units are arranged on a second-plane side, the opposite side. A depletion prevention layer is arranged closer to the second-plane side than the charge accumulating units. The depletion prevention layer prevents a depletion region around the charge accumulating units from reaching the second plane of the semiconductor base. The depletion prevention layer can suppress surface dark current going into the charge accumulating units. Meanwhile, an energy ray incident from the second-plane side pass through the depletion prevention layer to generate signal charges in the charge accumulating units (depletion regions). The charge accumulating units collect, on a pixel-by-pixel basis, the signal charges which are to be transported to the charge transfer unit under voltage control or the like, and then are read to exterior as image signals.

Abstract: A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.

Abstract: A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.

Abstract: The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.

Abstract: A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C.

Abstract: A movable plate 21 is fastened to a substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable plate 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror 12 which advances into and withdraws from the optical path is disposed on the movable plate 21. When the movable plate 21 is caused to move from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate 21 is moving from an intermediate position to the upper position.

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract: A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.

Abstract: The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.

Abstract: Radiation detectors are disclosed that include at least one element (pixel). In a pixel, a desired positional relationship between two “effecting” elements is maintained regardless of changes in temperature or other prevailing variable. The detectors can be “electrical capacitance” or “optical-readout” types. A pixel of the electrical capacitance type includes two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to respective displaceable members (configured as thermal bimorphs) having identical structures. A pixel of the optical readout type includes a half-mirror and a reflector that face each other and have a set gap therebetween. The half-mirror and reflector are attached to respective displaceable members. Radiation is absorbed by a radiation absorber that transfers the heat to certain displaceable members that bend to tilt accordingly.

Abstract: A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C.

Abstract: In the present invention, a charge transfer unit is arranged on a first-plane side of a thinly-formed semiconductor base. Charge accumulating units are arranged on a second-plane side, the opposite side. A depletion prevention layer is arranged closer to the second-plane side than the charge accumulating units. The depletion prevention layer prevents a depletion region around the charge accumulating units from reaching the second plane of the semiconductor base. The depletion prevention layer can suppress surface dark current going into the charge accumulating units. Meanwhile, an energy ray incident from the second-plane side pass through the depletion prevention layer to generate signal charges in the charge accumulating units (depletion regions). The charge accumulating units collect, on a pixel-by-pixel basis, the signal charges which are to be transported to the charge transfer unit under voltage control or the like, and then are read to exterior as image signals.

Abstract: Radiation detectors are disclosed that include at least one element (pixel). In a pixel, a desired positional relationship between two “effecting” elements is maintained regardless of changes in temperature or other prevailing variable. The detectors can be “electrical capacitance” or “optical-readout” types. A pixel of the electrical capacitance type includes two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to respective displaceable members (configured as thermal bimorphs) having identical structures. A pixel of the optical readout type includes a half-mirror and a reflector that face each other and have a set gap therebetween. The half-mirror and reflector are attached to respective displaceable members. Radiation is absorbed by a radiation absorber that transfers the heat to certain displaceable members that bend to tilt accordingly.

Abstract: The present invention concerns an image-pickup apparatus and a method for driving the same, adapted for reading signal charges accumulated in a plurality of photodetection portions provided on a predetermined plane through vertical transfer lines and a horizontal transfer line. The image-pickup apparatus has the structure for establishing potential wells having a length not smaller than a vertical width of a horizontal line, in the vertical transfer lines, thereby permitting the horizontal width of the vertical transfer lines to be decreased. Since the image-pickup apparatus has the structure for establishing the plurality of potential wells having signal charges in the vertical transfer lines at a predetermined time, the signal charges can be transferred efficiently with keeping low driving speed of the vertical transfer lines.

Abstract: In the present invention, a charge transfer unit is arranged on a first-plane side of a thinly-formed semiconductor base. Charge accumulating units are arranged on a second-plane side, the opposite side. A depletion prevention layer is arranged closer to the second-plane side than the charge accumulating units. The depletion prevention layer prevents a depletion region around the charge accumulating units from reaching the second plane of the semiconductor base. The depletion prevention layer can suppress surface dark current going into the charge accumulating units. Meanwhile, an energy ray incident from the second-plane side pass through the depletion prevention layer to generate signal charges in the charge accumulating units (depletion regions). The charge accumulating units collect, on a pixel-by-pixel basis, the signal charges which are to be transported to the charge transfer unit under voltage control or the like, and then are read to exterior as image signals.

Abstract: Radiation detectors are disclosed that include two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to the free ends of two respective displaceable members having identical structures. The displaceable members are each made of at least two layers, of different materials having different respective coefficients of thermal expansion, layered atop one another in a laminar fashion to form respective thermal bimorphs. Incident radiation is received by a radiation absorber that heats up from absorbed radiation. The heat is transferred to one of the displaceable members and exhibits a corresponding degree of bending (warping). The other displaceable member is not heated and exhibits no bending. The displaceable members are situated and configured such that each of the layers of all the displaceable members are formable simultaneously during respective fabrication steps.