Abstract: To provide a controller for internal combustion engine which suppresses that estimation of the combustion state is performed based on the angle information on which the component due to the torsional vibration is superimposed, when the torsional vibration occurs in the crankshaft. A controller for internal combustion engine determines whether a torsional vibration occurs in a crankshaft based on an angle period; calculates a gas pressure torque in burning based on a crank angle acceleration which is calculated based on the angle period; estimates a combustion state of an internal combustion engine based on the gas pressure torque in burning; and stops estimation of the combustion state, when it is determined that the torsional vibration occurred.

Abstract: To provide a controller for internal combustion engine which can improve the estimation accuracy of the period in the chipped tooth section, even if the period is suddenly varied in the chipped tooth section. A controller for internal combustion engine detects a period when the tooth passes, based on an output signal of the crank angle sensor; determines a period corresponding to the chipped tooth section; determines a crank angle corresponding to the passed tooth; and estimates a period of a virtual unit angle interval when assuming that the tooth is provided at the unit angle interval in the chipped tooth section, based on the period of the chipped tooth section, the period before the chipped tooth section, and the period after the chipped tooth section.

Abstract: To provide a controller for internal combustion engine which can improve the estimation accuracy of the period in the chipped tooth section, even if the period is suddenly varied in the chipped tooth section. A controller for internal combustion engine detects a period when the tooth passes, based on an output signal of the crank angle sensor; determines a period corresponding to the chipped tooth section; determines a crank angle corresponding to the passed tooth; and estimates a period of a virtual unit angle interval when assuming that the tooth is provided at the unit angle interval in the chipped tooth section, based on the period of the chipped tooth section, the period before the chipped tooth section, and the period after the chipped tooth section.

Abstract: To provide a controller for internal combustion engine which suppresses that estimation of the combustion state is performed based on the angle information on which the component due to the torsional vibration is superimposed, when the torsional vibration occurs in the crankshaft. A controller for internal combustion engine determines whether a torsional vibration occurs in a crankshaft based on an angle period; calculates a gas pressure torque in burning based on a crank angle acceleration which is calculated based on the angle period; estimates a combustion state of an internal combustion engine based on the gas pressure torque in burning; and stops estimation of the combustion state, when it is determined that the torsional vibration occurred.

Abstract: Second display means front parts, each including an immersion liquid surface level display for a coating liquid for moisture prevention and a lead-free display mark, are formed respectively in upper portions on a left side and a right side that are opposite sides having the one side interposed therebetween. A first display means front part including a board management document number, which defines a material for solder, is formed in a lower portion of the printed circuit board. A lead-free display mark (PBF) is not buried in or mixed with a large number of circuit information displays in the board, and a detailed management number is described in a reduced size to conserve space. Thus, the important lead-free display mark can be displayed with large character marks that also serve to manage a liquid surface.

Abstract: Second display means front parts, each including an immersion liquid surface level display for a coating liquid for moisture prevention and a lead-free display mark, are formed respectively in upper portions on a left side and a right side that are opposite sides having the one side interposed therebetween. A first display means front part including a board management document number, which defines a material for solder, is formed in a lower portion of the printed circuit board. A lead-free display mark (PBF) is not buried in or mixed with a large number of circuit information displays in the board, and a detailed management number is described in a reduced size to conserve space. Thus, the important lead-free display mark can be displayed with large character marks that also serve to manage a liquid surface.

Abstract: An apparatus includes an irradiation device configured to irradiate an object with charged particle beams, a measurement device configured to measure a characteristic of each of charged particle beams, and a controller. The measurement device includes a plate including knife edges, and a sensor configured to detect a charged particle beam incident thereon via the plate. The controller causes one charged particle beam, selected from the charged particle beams, to perform a scan relative to the measurement device so that the one charged particle beam traverses at least two knife edges among the plurality of knife edges, and to generate correction information for correcting a measurement error of the measurement device due to deformation of the plate, based on an output from the sensor upon the scan.

Abstract: An irradiation apparatus includes: a measurement device including a shield in which plural apertures are formed, and plural detectors configured to respectively detect plural charged particle beams respectively having passed through the plural apertures; a scanning mechanism configured to perform scanning of the plural beams and the measurement device relative to each other so that the plural beams respectively traverse edges of the plural apertures; and a controller configured to perform control of the scanning mechanism and the measurement device to obtain a characteristic of each beam. The controller is configured to perform the control such that in a period of the scanning, an energy, shielded by the shield, out of an energy of one beam increases with time, while an energy, shielded by the shield, out of an energy of another beam decreases with time.

Abstract: A scanning exposure apparatus exposing a substrate to a pattern of an original through a projection optical system while relatively moving the original and the substrate, includes a substrate stage movable while holding the substrate; a measurement system measuring a position of the substrate in an optical-axis direction of the projection optical system; and a controller relatively moving the original and the substrate while controlling a position of the substrate stage in the optical-axis direction, on the basis of the position of the substrate detected by the measurement system. The controller keeps accelerating the substrate stage up to a starting position of the irradiation of the exposure light for a target shot area on the substrate, and during the acceleration, controls the position of the substrate stage in the optical-axis direction, on the basis of a position of a surface of an exposed shot area, which has been exposed previously.

Abstract: A scanning exposure apparatus exposing a substrate to a pattern of an original through a projection optical system while relatively moving the original and the substrate, includes a substrate stage movable while holding the substrate; a measurement system measuring a position of the substrate in an optical-axis direction of the projection optical system; and a controller relatively moving the original and the substrate while controlling a position of the substrate stage in the optical-axis direction, on the basis of the position of the substrate detected by the measurement system. The controller keeps accelerating the substrate stage up to a starting position of the irradiation of the exposure light for a target shot area on the substrate, and during the acceleration, controls the position of the substrate stage in the optical-axis direction, on the basis of a position of a surface of an exposed shot area, which has been exposed previously.