Abstract: A film formation apparatus for forming a thin film having high gas barrier performance, such as a DLC (Diamond Like Carbon) film, a SiOx film, a SiOC film, a SiOCN film, a SiNx film, and an AlOx film, on an inner surface and/or an outer surface of a container such as a PET bottle. The film formation apparatus has: a vacuum chamber for forming, in a vacuum state, a film on a surface of a container using a heat generating element; a vacuum evacuation device for vacuumizing the vacuum chamber; and a relative shifting device for relatively shifting the container and the heat generating element in the vacuum chamber after the vacuumization of the vacuum chamber.

Abstract: The present invention relates to a film formation apparatus for forming thin films having high gas barrier performance, such as a DLC (Diamond Like Carbon) film, SiOx film, SiOC film, SiOCN film, SiNx film, and AIOx film, on the inner surface and/or outer surface of containers such as PET bottles. The film formation apparatus is provided with: a vacuum chamber for forming, in a vacuum state, a film on a surface of a container (4) using a heat generating element (21); a vacuum evacuation device for vacuumizing the vacuum chamber; and a relative shifting device for relatively shifting the container (4) and the heat generating element (21) in the vacuum chamber after starting vacuumization of the vacuum chamber.

Abstract: A semiconductor integrated circuit includes a first ring oscillator to which a stress voltage is applied; a second ring oscillator to which the stress voltage is not applied; and a phase comparator configured to receive an output of the first ring oscillator and an output of the second ring oscillator, and to compare phases of the outputs. The first ring oscillator includes a switch circuit configured to switch between a first connection state in which ring connection of the first ring oscillator is disconnected to connect a predetermined node of the second ring oscillator to a predetermined node of the first ring oscillator, and a second connection state in which connection between the first ring oscillator and the second ring oscillator is disconnected to connect the first ring oscillator in a ring.

Abstract: A chuck device having a pair of arms rotatably supported by arm shafts and an operation member. One of the arms is provided with a roller shaft rotatable together with the arm about one of the arm shafts. The other arm is provided with an arm drive portion rotatable together with the arm. The arm drive portion is biased so as to press a second roller. Between the operation member and the roller shaft is provided a motion input mechanism for converting the motion of the operation member to rotational motion of the roller shaft about the arm shaft as the center of rotation. Between the roller shaft and the arm drive portion is provided an interlock mechanism that causes the arm drive portion to rotate about the arm shaft in conjunction with the motion of the roller shaft about the arm shaft as the center of rotation.

Abstract: A loading mechanism holds at least one extracting cartridge provided with a filter member, at least one waste liquid vessel for accommodating a discharged liquid of a sample liquid and a discharged liquid of a washing liquid, which discharged liquids have been discharged from the extracting cartridge, and at least one recovery vessel for accommodating a recovery liquid, which contains a recovered nucleic acid and has been discharged from the extracting cartridge. A pressurized air supplying mechanism introduces pressurized air into the extracting cartridge. A liquid injecting mechanism injects each of the washing liquid and the recovery liquid into the extracting cartridge.

Abstract: A mechanism for introducing pressurized air into an extracting cartridge comprises an air pump, an on-off valve, and a pressure sensor for detecting an internal pressure within the extracting cartridge. The on-off valve is turned on in order to introduce the pressurized air into the extracting cartridge. When the internal pressure detected by the pressure sensor has become equal to a predetermined pressure range for a pressurization upper limit, the on-off valve is turned off in order to confine the area within the extracting cartridge in the pressurized state, the pressure being thereby exerted upon a sample liquid, a washing liquid, or a recovery liquid having been injected into the extracting cartridge.

Abstract: A loading mechanism holds at least one extracting cartridge provided with a filter member, at least one waste liquid vessel for accommodating a discharged liquid of a sample liquid and a discharged liquid of a washing liquid, which discharged liquids have been discharged from the extracting cartridge, and at least one recovery vessel for accommodating a recovery liquid, which contains a recovered nucleic acid and has been discharged from the extracting cartridge. A pressurized air supplying mechanism introduces pressurized air into the extracting cartridge. A liquid injecting mechanism injects each of the washing liquid and the recovery liquid into the extracting cartridge.

Abstract: A wafer collective reliability evaluation device comprises a wafer collective probe disposed so as to face a reliability evaluation wafer and including a wiring substrate, a conductive elastic sheet provided on a surface of the wiring substrate facing the reliability evaluation wafer and a plurality of metal terminals provided in a surface of the conductive elastic sheet and electrically connected to the reliability evaluation wafer. The reliability evaluation wafer comprises a plurality of reliability evaluation elements formed on a main body of a semiconductor wafer, a plurality of electrodes for applying voltage or current to the respective reliability evaluation elements via the respective metal terminals and a plurality of heating elements formed in the vicinity of the respective reliability evaluation elements and serving to control temperatures of the respective reliability evaluation elements.

Abstract: A chuck device having a pair of arms rotatably supported by arm shafts and an operation member. One of the arms is provided with a roller shaft rotatable together with the arm about one of the arm shafts. The other arm is provided with an arm drive portion rotatable together with the arm. The arm drive portion is biased so as to press a second roller. Between the operation member and the roller shaft is provided a motion input mechanism for converting the motion of the operation member to rotational motion of the roller shaft about the arm shaft as the center of rotation. Between the roller shaft and the arm drive portion is provided an interlock mechanism that causes the arm drive portion to rotate about the arm shaft in conjunction with the motion of the roller shaft about the arm shaft as the center of rotation.

Abstract: A wafer collective reliability evaluation device comprises a wafer collective probe disposed so as to face a reliability evaluation wafer and including a wiring substrate, a conductive elastic sheet provided on a surface of the wiring substrate facing the reliability evaluation wafer and a plurality of metal terminals provided in a surface of the conductive elastic sheet and electrically connected to the reliability evaluation wafer. The reliability evaluation wafer comprises a plurality of reliability evaluation elements formed on a main body of a semiconductor wafer, a plurality of electrodes for applying voltage or current to the respective reliability evaluation elements via the respective metal terminals and a plurality of heating elements formed in the vicinity of the respective reliability evaluation elements and serving to control temperatures of the respective reliability evaluation elements.

Abstract: An extraction cartridge having a filter member extracts a specific material such as a nucleic acid. The specific material is caused to be adsorbed to the filter member by pressurizing a sample liquid containing a specific material. A pressurized-air supply mechanism for introducing pressurized air into a plurality of the extraction cartridges includes an air pump, opening and closing valves for individually starting or stopping supply of the pressurized air to the plurality of extraction cartridges, and pressure relief valves for individually relieving the pressures in the extraction cartridges to the atmosphere. These valves are disposed partway along a feed passage to the extraction cartridges. The extraction cartridges are supplied with pressurized air, and then sealed. Upon completion of the drainage of any one of the extraction cartridges, the pressure relief valve associated with the completely drained extraction cartridge is independently opened to relieve the pressurized air remaining therein.

Abstract: A loading mechanism holds at least one extracting cartridge provided with a filter member, at least one waste liquid vessel for accommodating a discharged liquid of a sample liquid and a discharged liquid of a washing liquid, which discharged liquids have been discharged from the extracting cartridge, and at least one recovery vessel for accommodating a recovery liquid, which contains a recovered nucleic acid and has been discharged from the extracting cartridge. A pressurized air supplying mechanism introduces pressurized air into the extracting cartridge. A liquid injecting mechanism injects each of the washing liquid and the recovery liquid into the extracting cartridge.

Abstract: A mechanism for introducing pressurized air into an extracting cartridge comprises an air pump, an on-off valve, and a pressure sensor for detecting an internal pressure within the extracting cartridge. The on-off valve is turned on in order to introduce the pressurized air into the extracting cartridge. When the internal pressure detected by the pressure sensor has become equal to a predetermined pressure range for a pressurization upper limit, the on-off valve is turned off in order to confine the area within the extracting cartridge in the pressurized state, the pressure being thereby exerted upon a sample liquid, a washing liquid, or a recovery liquid having been injected into the extracting cartridge.

Abstract: A semiconductor integrated circuit testing system for testing electric characteristics of a plurality of semiconductor integrated circuit devices formed on a semiconductor wafer in the lump includes a wafer tray for holding the semiconductor wafer and an interconnect substrate facing the semiconductor wafer held on the wafer tray and having interconnect layers to which a testing voltage is externally input. A ring-shaped sealing member is provided between the wafer tray and the interconnect substrate so as to form a sealed space together with the wafer tray and the interconnect substrate. An elastic sheet is held on the interconnect substrate at the periphery thereof. A plurality of probe terminals electrically connected to the interconnect layers are provided on the elastic sheet in positions respectively corresponding to external electrodes of the plural semiconductor integrated circuit devices.

Abstract: A semiconductor integrated circuit testing system for testing electric characteristics of a plurality of semiconductor integrated circuit devices formed on a semiconductor wafer in the lump includes a wafer tray for holding the semiconductor wafer and an interconnect substrate facing the semiconductor wafer held on the wafer tray and having interconnect layers to which a testing voltage is externally input. A ring-shaped sealing member is provided between the wafer tray and the interconnect substrate so as to form a sealed space together with the wafer tray and the interconnect substrate. An elastic sheet is held on the interconnect substrate at the periphery thereof. A plurality of probe terminals electrically connected to the interconnect layers are provided on the elastic sheet in positions respectively corresponding to external electrodes of the plural semiconductor integrated circuit devices.

Abstract: A liquid sprinkler having a substantially hemispherical shaped head at the upper end of a vertical rise pipe. The head is spaced above an area to be watered and has a plurality of nozzles on the hemispherical surface which are sized and positioned to afford even water distribution over the watered area.

Abstract: In a unit part of a lead frame for mounting a semiconductor chip, connecting leads and supporting leads extending from a lead frame main body toward a semiconductor chip mounting region are formed. Between each supporting lead and the lead frame main body, a movable part and a spring part for elastically supporting the movable part are disposed. The tip portion of the supporting lead connected with the movable part extends to the inside of the semiconductor chip mounting region in the natural state of the movable part, so that the tip portion butts against the side face of a semiconductor chip when the semiconductor chip is mounted. Thus, the semiconductor chip can be supported and fixed by using a bias force applied by the spring part. The base portions of the supporting leads, the movable part and the spring part do not remain in a package, and hence do not cause a stress in the package and do not increase the volume of the package.