Abstract: Provided is a wet atomizer capable of stably increasing a pressure in a pressurizing chamber and performing highly reproducible raw material process. A wet atomizer includes a motor; a power transmission device that converts a rotational motion of the motor into a reciprocating motion; a high-pressure cylinder; a plunger that reciprocates inside the high-pressure cylinder by the power transmission device to pressurize raw materials; a drive controller that controls the reciprocating motion of the plunger; a nozzle that atomizes pressurized raw material; a first check valve disposed downstream of the nozzle; and a first elastic member that presses the first check valve.

Abstract: A motor driving controller, comprising a rotary position detection device generating a position detection signal corresponding to a rotary position of a rotor of a motor; a control circuit selecting a first driving control signal for performing rectangular wave driving or a second driving control signal for performing driving with an overlapped energization period longer than an overlapped energization period in the rectangular wave driving, based on the position detection signal, thereby to output a driving control signal; and a motor driver outputting a driving signal to a stator coil of the motor based on the driving control signal, wherein the control circuit outputs the first driving control signal at time of starting, and the control circuit outputs the second driving control signal when a rotary state is detected on the basis of the position detection signal.

Abstract: A motor control circuit comprising a speed control circuit configured to output speed command information relating to the rotational speed of a motor based on target information relating to a target rotational speed and rotational speed detection information of the rotational speed of the motor, a drive stop control circuit configured to output a first drive stop control signal for performing braking control of the motor or a second drive stop control signal for performing free-run stop control of the motor based on the rotational speed detection information and the speed command information when input of the target information is stopped, and a drive signal generation circuit configured to generate a drive control signal for driving the motor based on the first drive stop control signal or the second drive stop control signal when the first drive stop control signal or the second drive stop control signal is output.

Abstract: A motor control circuit comprising a speed control circuit configured to output speed command information relating to the rotational speed of a motor based on target information relating to a target rotational speed and rotational speed detection information of the rotational speed of the motor, a drive stop control circuit configured to output a first drive stop control signal for performing braking control of the motor or a second drive stop control signal for performing free-run stop control of the motor based on the rotational speed detection information and the speed command information when input of the target information is stopped, and a drive signal generation circuit configured to generate a drive control signal for driving the motor based on the first drive stop control signal or the second drive stop control signal when the first drive stop control signal or the second drive stop control signal is output.

Abstract: A motor drive controller includes: a rotation status detector that detects a rotation status of a rotor of a motor and generates rotation status detection information corresponding to the detected rotation status; a rotation unevenness information generator that measures a rotation unevenness indicating a flutter characteristic of the motor based on the rotation status detection information and generates rotation unevenness information according to a result of measurement of the rotation unevenness; a control circuit that generates a driving control signal based on the rotation unevenness information and the target speed signal for controlling the motor to rotate in target speed corresponding to the target speed signal; and a motor driver that outputs a driving signal to the motor based on the driving control signal.

Abstract: A motor driving device includes a control unit which outputs a pre-driving signal to control a motor based on command information of an input target number of rotations and detection information of a number of rotations of the motor, and a motor driving unit which drives the motor based on the pre-driving signal. The control unit includes a speed control circuit which outputs speed command information based on the command information of the target number of rotations and the detection information, a stop control circuit which when an input of the command information of the target number of rotations is stopped, outputs stop command information after a predetermined time elapses from detection of stop of the motor, and a driving signal generation circuit which generates a control signal based on the stop command information and the speed command information.

Abstract: A motor driving controller, comprising a rotary position detection device generating a position detection signal corresponding to a rotary position of a rotor of a motor; a control circuit selecting a first driving control signal for performing rectangular wave driving or a second driving control signal for performing driving with an overlapped energization period longer than an overlapped energization period in the rectangular wave driving, based on the position detection signal, thereby to output a driving control signal; and a motor driver outputting a driving signal to a stator coil of the motor based on the driving control signal, wherein the control circuit outputs the first driving control signal at time of starting, and the control circuit outputs the second driving control signal when a rotary state is detected on the basis of the position detection signal.

Abstract: A motor drive controller includes: a control circuit unit configured to output a drive control signal for driving a motor in response to a command signal externally input to the control circuit unit; and a motor driving unit configured to output a drive signal to the motor based on the drive control signal output from the control circuit unit. The control circuit unit is provided with: a speed setting unit configured to generate a target rotation speed signal corresponding to a target rotation speed based on a command step determined in response to a step command signal and predetermined setting information when the step command signal is input as the command signal; and a drive control signal generating unit configured to generate and output the drive control signal based on the target rotation speed signal.

Abstract: A motor drive controller includes: a rotation status detector that detects a rotation status of a rotor of a motor and generates rotation status detection information corresponding to the detected rotation status; a rotation unevenness information generator that measures a rotation unevenness indicating a flutter characteristic of the motor based on the rotation status detection information and generates rotation unevenness information according to a result of measurement of the rotation unevenness; a control circuit that generates a driving control signal based on the rotation unevenness information and the target speed signal for controlling the motor to rotate in target speed corresponding to the target speed signal; and a motor driver that outputs a driving signal to the motor based on the driving control signal.

Abstract: A motor drive controller includes: a control circuit unit configured to output a drive control signal for driving a motor in response to a command signal externally input to the control circuit unit; and a motor driving unit configured to output a drive signal to the motor based on the drive control signal output from the control circuit unit. The control circuit unit is provided with: a speed setting unit configured to generate a target rotation speed signal corresponding to a target rotation speed based on a command step determined in response to a step command signal and predetermined setting information when the step command signal is input as the command signal; and a drive control signal generating unit configured to generate and output the drive control signal based on the target rotation speed signal.

Abstract: A motor driving device includes a communication path selection unit, to which operation command information for controlling driving of a motor is input in a serial data format or a parallel data format via a common input path, a communication unit which includes a serial interface unit for the serial data format and a parallel interface unit for the parallel data format, and outputs a control signal based on the operation command information input via the communication path selection unit, and a driving control unit which controls driving of the motor based on the control signal. The communication path selection unit selects between outputs path to the serial interface unit and the parallel interface unit, which corresponds to the data format of the input operation command information, and outputs the input operation command information to the serial interface unit or the parallel interface unit through the selected output path.

Abstract: A motor driving device includes a control unit which outputs a pre-driving signal to control a motor based on command information of an input target number of rotations and detection information of a number of rotations of the motor, and a motor driving unit which drives the motor based on the pre-driving signal. The control unit includes a speed control circuit which outputs speed command information based on the command information of the target number of rotations and the detection information, a stop control circuit which when an input of the command information of the target number of rotations is stopped, outputs stop command information after a predetermined time elapses from detection of stop of the motor, and a driving signal generation circuit which generates a control signal based on the stop command information and the speed command information.

Abstract: A motor driving device includes a communication path selection unit, to which operation command information for controlling driving of a motor is input in a serial data format or a parallel data format via a common input path, a communication unit which includes a serial interface unit for the serial data format and a parallel interface unit for the parallel data format, and outputs a control signal based on the operation command information input via the communication path selection unit, and a driving control unit which controls driving of the motor based on the control signal. The communication path selection unit selects between outputs path to the serial interface unit and the parallel interface unit, which corresponds to the data format of the input operation command information, and outputs the input operation command information to the serial interface unit or the parallel interface unit through the selected output path.

Abstract: A resist pattern, containing a material capable of generating an acid by exposure to light, is covered with a resist containing a material capable of crosslinkage in the presence of an acid. The acid is generated in the resist pattern by application of heat or by exposure to light, and a crosslinked layer is formed at the interface as a cover layer for the resist pattern, thereby causing the resist pattern to be thickened. Thus, the hole diameter of the resist pattern can be reduced, or the isolation width of a resist pattern can be reduced.

Abstract: There is described a method of producing a pure resist pattern having superior topography smaller than the limit of wavelength of exposure light. A first resist pattern containing material capable of producing an acid on exposure to light is coated with a second resist containing material which causes a crosslinking reaction in the presence of an acid. An acid is produced in the resist pattern by exposing the pattern to light, thus forming a crosslinked layer along the boundary surface between the first resist pattern and the second resist. As a result, a second resist pattern which is greater than the first resist pattern is formed. Minute pure resist patterns are produced through two-step processing: that is, by removing the second resist from the substrate through use of a liquid prepared by dissolving an organic solvent into water and by rinsing the substrate with water. The diameter of holes formed in the resist or the interval between isolated patterns can be reduced.

Abstract: A first resist pattern, which is capable of generating an acid, is formed on a semiconductor device layer. Over the first resist pattern, a layer of a second resist, which is capable of undergoing an cross-linking reaction in the presence of an acid, is formed. Then, a cross-linked film is formed in portions of said layer of the second resist at the boundary with said first resist by action of an acid from said first resist. Thereafter, non-cross-linked portions of said second resist are removed to form a finely isolated resist pattern. The semiconductor device layer is etched, via a mask of said finely isolated resist pattern, to form a fine spaces or holes.

Abstract: An induction heating apparatus has a coil or coils which can be opened without using electrical contacts. One continuous electric current passageway is formed by a first coil section, a second coil section, a first connecting conductor and a second connecting conductor. By feeding electric power to this electric current passageway and passing an object through a space at the central portion of the coil sections, the object is induction heated. A gap is provided between the first connecting conductor and the second connecting conductor, or the respective connecting conductors can be opened and closed relative to one another to vary the size of the space therebetween. The object to be heated is carried into the space at the central portion of the coil and is carried out therefrom through the gap or the space between the conductors.

Abstract: An induction heating apparatus is disclosed which includes a high frequency power source having a leading phase angle setting circuit, which is supplied with a detection voltage signal from an output side of a high frequency inverter connected to a load circuit, to supply a leading phase angle signal to gates of thyristors of the inverter. The high frequency power source further includes a phase control circuit, provided after the voltage detection circuit, which is supplied with the detection voltage signal from the output side of the inverter to periodically control a phase of the detection voltage signal. The induction heating apparatus further includes a series inductor provided in between the power supply bus line connected to an induction heating coil wherein a magnetic member is provided to be inserted into and taken out of the inductor. A drive device is included for driving the magnetic member.

Abstract: A control system for a magnetic type bearing is fed back a signal from a position sensor with respect to a floating member to effect control such as phase compensation so that the magnetic type bearing is actively employed. In order to change unstabilizing force produced by the magnetic type bearing in a specified frequency range to stabilizing force, a first signal obtained by causing the signal from the position sensor to pass through a first filter having a cut-off frequency range corresponding to a predetermined frequency range in which stabilization is to be attained and a second signal obtained by causing a signal having an opposite polarity to that of the signal from the position sensor to pass through a second filter having a passing frequency range which is substantially identical with the predetermined frequency range are added to each other and the addition signal is fed back to an electromagnet.

Abstract: A balancer of a reciprocating machine having crank mechanisms includes an adjusting weight having one end supported by a reciprocating portion of a crank mechanism for the balancer. An adjusting weight support rotatably supports the other end of the adjusting weight with respect to a stationary portion of a body frame. The adjusting weight support is equipped with a weight support position altering mechanism for permitting alteration of the support position of the adjusting weight.