Abstract: A butterfly valve to be placed on a pipe between a vacuum chamber provided with a pressure sensor and a vacuum pump is configured to control the pressure in the vacuum chamber. The butterfly valve includes a servo motor, a butterfly valve element to be rotated about a rod connected to the servo motor in an opening or closing direction, and a control unit to adjust an opening degree of the butterfly valve element based on a pressure value of the vacuum chamber detected by the pressure sensor. The control unit is provided with an abnormal vibration detection program configured to whether or not abnormal vibration is occurring in the servo motor based on a variation amount of the opening degree of the butterfly valve element within a monitoring time while at least the pressure value of the vacuum chamber is stable.

Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

Abstract: A butterfly valve to be placed on a pipe between a vacuum chamber provided with a pressure sensor and a vacuum pump is configured to control the pressure in the vacuum chamber. The butterfly valve includes a servo motor, a butterfly valve element to be rotated about a rod connected to the servo motor in an opening or closing direction, and a control unit to adjust an opening degree of the butterfly valve element based on a pressure value of the vacuum chamber detected by the pressure sensor. The control unit is provided with an abnormal vibration detection program configured to whether or not abnormal vibration is occurring in the servo motor based on a variation amount of the opening degree of the butterfly valve element within a monitoring time while at least the pressure value of the vacuum chamber is stable.

Abstract: A spool valve includes: a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction, and a cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion. The cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port to cause the first port to or not to communicate with the second port, and the first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction.

Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

Abstract: The flow path switching valve includes (a) a valve body having an open flow path which opens on a predetermined surface over a predetermined length in a predetermined direction, (b) a main body having a plurality of ports which open on a facing surface facing the predetermined surface at an interval shorter than the predetermined length in the predetermined direction, and a plurality of connection flow paths connected to the plurality of ports, (c) plate springs attached on both ends of the valve body in the predetermined direction so as to support the valve body such that a predetermined gap is formed between the predetermined surface and the facing surface, the plate springs applying elastic force onto the valve body according to a movement amount of the valve body in the predetermined direction, and (d) an actuator which drives the valve body back and forth in the predetermined direction.

Abstract: A spool valve includes: a cylindrical tubular sleeve that extends in an axial direction and comprises a first port and a second port separated from each other in the axial direction, and a cylindrical columnar spool that extends in the axial direction and comprises a diameter reduced portion. The cylindrical columnar spool moves in the axial direction through the sleeve and opens and closes the first port to cause the first port to or not to communicate with the second port, and the first port has a first through hole having a first width in a circumferential direction of the sleeve, and a second through hole having a second width different from the first width in the circumferential direction.

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract: The flow path switching valve includes (a) a valve body having an open flow path which opens on a predetermined surface over a predetermined length in a predetermined direction, (b) a main body having a plurality of ports which open on a facing surface facing the predetermined surface at an interval shorter than the predetermined length in the predetermined direction, and a plurality of connection flow paths connected to the plurality of ports, (c) plate springs attached on both ends of the valve body in the predetermined direction so as to support the valve body such that a predetermined gap is formed between the predetermined surface and the facing surface, the plate springs applying elastic force onto the valve body according to a movement amount of the valve body in the predetermined direction, and (d) an actuator which drives the valve body back and forth in the predetermined direction.

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract: The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that circulates the fluid in the temperature adjustment unit without passing the fluid through the heating pathway and the cooling pathway, an adjustment means that adjusts a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit, and a flow means that flows the fluid in order to circulate the fluid, and wherein a heating unit for heating the fluid is arranged in the heating pathway, and the flow means is disposed downstream from the heating unit along at least one of the pathways for circulating the fluid.

Abstract: A fluid flow distribution and supply unit for distributing and supplying a fluid is adapted to immediately control a flow rate of a fluid to be distributed and promptly output the fluid at a predetermined flow distribution ratio. The fluid flow distribution and supply unit comprises a flow rate control device for controlling a flow rate of the fluid and a plurality of on/off valves connected to a secondary side of the flow rate control device. The on/off valves are duty controlled to open and close by determining one cycle corresponding to an operation period of the on/off valves and time-dividing the one cycle at the flow distribution ratio.

Abstract: A head assembly moving along a long side of a magnetic card, more than one magnetic head rotating in the head assembly for reading/writing data, a rotary transformer and a carriage with a card holding mechanism for keeping a card at a predefined position are provided in a card reader of the present invention. A rotating part of the rotary transformer in the head assembly receives and sends a signal to the magnetic head and a fixing part of the rotary transformer is connected to a reading/writing circuit. On the card of the present invention, which is usually rectangular, there are tracks defined by plural arcs. The arcs are on plural same-size circles whose centers are aligned on one line along the long side of the card. A magnetic card or an optical card can be used for the present invention.

Abstract: An identification sequence issuing device comprising a code converter portion for converting an identification sequence character string that may include letters, numerals, and the like, into a string of character codes having one-to-one correspondence to the characters in the character string, and a check and selection portion for selecting as an identification sequence the character string corresponding to a character code string that is determined to meet a Reed-Solomon code rule with each character code being a symbol of the Reed-Solomon code and the character code string length being the length of the Reed-Solomon code. The identification sequence is issued based on the Reed-Solomon code of a generating polynomial having a plurality of initial elements as roots, and for additional issuing, identification sequences are issued based on the Reed-Solomon code with the number of roots of the generating polynomial reduced by 1.

Abstract: A head assembly moving along a long side of a magnetic card, more than one magnetic head rotating in the head assembly for reading/writing data, a rotary transformer and a carriage with a card holding mechanism for keeping a card at a predefined position are provided in a card reader of the present invention. A rotating part of the rotary transformer in the head assembly receives and sends a signal to the magnetic head and a fixing part of the rotary transformer is connected to a reading/writing circuit. On the card of the present invention, which is usually rectangular, there are tracks defined by plural arcs. The arcs are on plural same-size circles whose centers are aligned on one line along the long side of the card. A magnetic card or an optical card can be used for the present invention.

Abstract: A flexible disk drive unit including a spindle motor for driving to rotate a magnetic disk; magnetic heads opposing the magnetic disk; a carriage attached to a frame and movable in a radius direction of the magnetic disk; wherein the frame and a motor base constitute a common member and the spindle motor is of a sensorless drive system and is directly attached to the frame; and wherein the frame is provided with an attaching hole for erecting a bearing of the spindle motor of the sensorless drive system on the frame.

Abstract: A brushless motor driving circuit is provided for obtaining a reliable starting and stable rotation driving irrespective of the load condition of the motor. The brushless motor driving circuit has a terminal voltage detector located at each phase of the armature windings of the motor, a terminal voltage compensator for adding or subtracting a compensation value to/from the terminal voltage of the armature windings detected at respective phases during actual driving periods, and a comparator for comparing respective terminal voltages to obtain a rotor location signal after compensation has been performed. The compensation value is determined by a resistor of the armature winding and a winding current. The armature windings are driven by the rotor location signal detected at the comparator.

Abstract: A method of encoding position information of each recording portion on a recording medium with a predetermined number of information units, which includes the step of composing position information codes such that the first position information code of the first recording portion is different by one information unit from the second position information code of the second recording portion which is spaced by one recording portion from the first recording portion, by two information units from the third position information code of the third recording portion which is spaced by two recording portions, and by three information units or more from the fourth position information code of the fourth recording portion which is spaced by three recording portions or more.