Abstract: A vibrator that produces bending vibration with both ends unsupported is mounted on one principal surface of a mounting board, and a driving-and-detecting circuit component is also mounted to cross over an antinode center line of bending vibration of the mounting board due to resonance. The original self-resonance frequency of bending vibration of the mounting board itself is lower than the frequency of bending vibration of the vibrator. The modified self-resonance frequency of bending vibration of the mounting board when the vibrator and the driving-and-detecting circuit component are mounted thereon is higher than the original self-resonance frequency, and does not coincide with the frequency of bending vibration of the vibrator.

Abstract: A vibration gyro which is a sensor circuit module includes a packaging substrate, a vibrator mounted on the substrate, a chip type semiconductor element mounted by flip-chip bonding, a chip element, and a cover. The portion of the end surfaces of the packaging substrate in which no through-hole terminals are formed is coated with a light-shielding coating material which is a light-transmission-stopping member. Preferably, the color of the light-shielding coating material is as dark as possible, and is black, if possible.

Abstract: A vibrator that produces bending vibration with both ends unsupported is mounted on one principal surface of a mounting board, and a driving-and-detecting circuit component is also mounted to cross over an antinode center line of bending vibration of the mounting board due to resonance. The original self-resonance frequency of bending vibration of the mounting board itself is lower than the frequency of bending vibration of the vibrator. The modified self-resonance frequency of bending vibration of the mounting board when the vibrator and the driving-and-detecting circuit component are mounted thereon is higher than the original self-resonance frequency, and does not coincide with the frequency of bending vibration of the vibrator.

Abstract: An angular velocity sensor includes a vibrator. A differential amplifier circuit outputs a differential signal including a Coriolis component from the vibrator. The differential signal is converted into a digital signal by an A/D converter. A Hilbert transformer shifts the differential signal by &pgr;/2. Two multipliers squares the original differential signal and the &pgr;/2-phase-shifted differential signal, respectively, and an adder computes the sum of the squares. A square root circuit computes the square root of the sum and outputs a magnitude signal proportional to Coriolis force.

Abstract: A vibration gyro which is a sensor circuit module includes a packaging substrate, a vibrator mounted on the substrate, a chip type semiconductor element mounted by flip-chip bonding, a chip element, and a cover. The portion of the end surfaces of the packaging substrate in which no through-hole terminals are formed is coated with a light-shielding coating material which is a light-transmission-stopping member. Preferably, the color of the light-shielding coating material is as dark as possible, and is black, if possible.

Abstract: An angular velocity sensor includes a vibrator. A differential amplifier circuit outputs a differential signal including a Coriolis component from the vibrator. The differential signal is converted into a digital signal by an A/D converter. A Hilbert transformer shifts the differential signal by &pgr;/2. Two multipliers squares the original differential signal and the &pgr;/2-phase-shifted differential signal, respectively, and an adder computes the sum of the squares. A square root circuit computes the square root of the sum and outputs a magnitude signal proportional to Coriolis force.

Abstract: A vibrating gyroscope includes a vibrating body and at least one driving member located on the vibrating body. The at least one driving member is arranged vibrate the vibrating body in a direction that is substantially perpendicular to an axis of the vibrating body. At least two detection members are are arranged so as to be spaced from each other and operatively connected to the vibrating body. The at least two detection members are located on opposite sides of a plane which includes the axis and a vibrating direction of the vibrating body such that the at least two detection members detect vibration of the vibrating body at substantially the same amount and detect at a different amount a Coriolis force generated by a rotational angular velocity applied to the vibrating body..

Abstract: A method of forming a vibrating gyroscope includes the steps of providing a vibrating body and disposing at least one driving member on the vibrating body so that the at least one driving member is arranged to generate vibration in the vibrating body in a vibrating direction that is substantially perpendicular to an axis of the vibrating body. Then, at least two detection members are disposed on the vibrating body such that the at least two detection members are spaced from each other, located on opposite sides of a plane including the axis and the vibrating direction of the vibrating body, arranged to detect a rotational angular velocity applied to the vibrating body and arranged in a non-parallel relationship relative to each other and in a non-parallel relationship relative to the at least one driving member.

Abstract: A vibrating gyroscope comprising includes a vibrating body. At least one driving member is located on the vibrating body and vibrates the vibrating body in a vibrating direction that is substantially perpendicular to an axis of said vibrating body. At least two detection members are located so as to be spaced from each other on the vibrating body and located on opposite sides of a plane including the axis and the vibrating direction of the vibrating body. The at least one driving member is arranged in a non-parallel relationship relative to each of the at least two detection members. The at least two detection members are arranged to detect a rotational angular velocity applied to the vibrating body and the at least two detection members are arranged in a non-parallel relationship relative to each other.

Abstract: The vibrator includes, for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Abstract: The vibrator includes for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Abstract: The vibrator includes, for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Abstract: The vibrator includes, for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Abstract: The vibrator includes, for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.