Patents by Inventor Keiichi Takami

Keiichi Takami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for washing silicon ingot with water to remove particulate matter
    Patent number: 6006736
    Abstract: A method and apparatus for washing a sliced silicon ingot reduces the consumption of detergent used to clean the ingot after it is sliced to define individual semiconductor wafers. The ingot is taken as a unit mounted to a holder after slicing to a pre-washing machine. The machine sprays jets of warm to hot water onto the ingot and holder to flush away dust generated during the slicing procedure which has adhered to the ingot. The water spray removes much of the dust. Thus when the ingot is subsequently washed with detergent, less dust must be removed thereby increasing the effective performance life of a given quantity of detergent.
    Type: Grant
    Filed: April 21, 1998
    Date of Patent: December 28, 1999
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Yoshihiro Suzuki, Koichi Kato, Keiichi Takami, Ryoichi Kawamura, Takehiro Watanabe, Masahiro Kosako