Abstract: A plasma processing device according to the present invention includes a plasma processing chamber consisting of a vacuum container, a pair of substrate holders standing opposite each other in the plasma processing chamber, a plurality of first reaction gas tubes provided between the two substrate holders, and a plurality of second reaction gas tubes provided between the plurality of first reaction gas tubes and each of the two substrate holders. The first reaction gas tubes, which are made of an electrically conductive material, are electrically connected to a first radio-frequency power source or second radio-frequency power source. The first reaction gas tubes double as a radio-frequency antenna, while the second reaction gas tubes double as an electrode.

Abstract: The vehicle electric rotating machine includes a pulley unit having an opening portion formed in an axial front end thereof, and configured to perform at least one of transmission and reception of a rotation drive force to and from the rotation shaft of the rotor, and a lid attached to the opening portion to close an internal space of the pulley unit. The rotor includes a rotor side receiving surface in contact with one axial end surface of an inner ring of the bearing rotatably supporting the rotor. The pulley unit includes a pulley side receiving surface in contact with the other axial end surface of the inner ring. An air passage enabling air communication between the internal space of the pulley unit closed by the lid and ambient space is formed in at least one of the rotor side receiving surface, the pulley side receiving surface, and the lid.