Abstract: A piezoelectric film and a second electrode and vibration plate are formed on one surface of a deposition substrate that transmits ultraviolet rays therethrough. A transfer substrate is attached to the second electrode and vibration plate. The other surface of the deposition substrate is irradiated with ultraviolet rays. The deposition substrate and the piezoelectric film are separated from each other by the energy of the ultraviolet rays, thus transferring the piezoelectric film and the second electrode and vibration plate onto the transfer substrate.

Abstract: A discharge-pumped gas laser, typically a discharge-pumped excimer laser, includes a main discharge circuit for producing an electric discharge in a laser gas to excite the laser gas for laser emission. The main discharge circuit comprises a first electric circuit having a thyratron, a charging circuit including a charging capacitor for storing an electric energy to operate the thyratron, and a discharging circuit including a pair of main discharge electrodes and a peaking capacitor for storing an electric energy to cause a main discharge in the laser gas between the main discharge electrodes. The laser gas is preionized by preionizers having a plurality of preionizing electrodes which produce an electric discharge to preionize the laser gas.

Abstract: A discharge-pumped gas laser has a pressure container filled with a laser gas under pressure and a pair of elongate main discharge electrodes. The main discharge electrodes are disposed in the pressure container in confronting relationship to each other for producing an electric discharge in the laser gas in a main discharge region defined therebetween to excite the laser gas for laser emission. The laser gas is circulated to flow through the main discharge region in a direction perpendicular to the main discharge electrodes. The laser gas in the main discharge region is preionized by an UV preionizer disposed either upstream or downstream of the main discharge region with respect to the direction of flow of the laser beam. The pressure container houses a baffle partition for controlling the laser gas to flow past one of the main discharge electrodes and the preionizer while blocking the laser gas from directly flowing to the other of the main discharge electrodes and the preionizer.

Abstract: A laser apparatus comprises an optical resonator including first and second mirrors, and laser medium. An wavelength selection element is provided in the resonator for narrowing band-width. A polarizing conversion element for changing ratio of S to P components and polarizing beam splitter are provided for amplifying laser beam to output after wavelength selection and for reducing light load of the wavelength selection element. The polarizing conversion element is provided in the resonator light path. In another embodiment, the polarizing conversion element is provided in a branch light path formed by a second polarizing conversion element and a third mirror, where the second polarizing conversion element reflects and transmits P component at a given ratio and reflects S component. The wavelength selection element comprises a Fabry-Perot etalon, grating, or prism. The polarizing conversion element comprises a quarter-wave plate or a phase retarder mirror.