Abstract: A vacuum film forming apparatus is provided that is intended to use a portion of its cylindrical member as a target and moreover have an additional function of plasma polymerization using the cylindrical member. A vacuum film forming apparatus (100) is provided with an electrically conductive vacuum chamber (13) having an interior space, a frame member (15) having a plurality of curved members (31, 32) each curved in a sector shape and arranged in the interior space (10) so as to form a substantially cylindrical shape, and a magnetic field forming device (33) disposed in an interior surrounded by the frame member (15) and configured to form a magnetic field along the circumference of the frame member (15). At least one of the curved members (15, 16) is a target used for sputtering, and a region of the frame member (15) other than the target is used for plasma polymerization.

Abstract: To allow an elevating body (17) in a clean robot (RB) installed in a clean room (R) to be located outside frames (4) without protruding from a swivel base (2) in order to enable the elevating body to be assembled and maintained easily and to ensure a wide elevating stroke. Two hollow frames (4, 4) extend vertically from the right and left sides of the rear of a swivel base (2) so as to be approximately symmetrical, a cover (9) is mounted between the frames (4, 4) and an elevating body (17) having a robot body (20) at its tip is accommodated in an elevating space (13) in the cover (9) and supported by rails (15) in the frames (4) so as to travel upward and downward.