Abstract: A person location detecting apparatus according to the present invention includes a light emitting section for radiating a projection light and a TOF method distance image sensor for receiving a reflected light from a room space of the projection light to output distance information in accordance with a distance to an object in the room space from each of a plurality of light receiving sections, and further includes a distance change detecting section for detecting a distance change to the object in the room space based on the distance information from the TOF method distance image sensor and a person distinguishing section for distinguishing a person by specifying a shape of a detected distance change area to detect a direction and distance to the distance change area that is specified as a shape of a person as a location of a person.

Abstract: A person location detecting apparatus according to the present invention includes a light emitting section for radiating a projection light and a TOF method distance image sensor for receiving a reflected light from a room space of the projection light to output distance information in accordance with a distance to an object in the room space from each of a plurality of light receiving sections, and further includes a distance change detecting section for detecting a distance change to the object in the room space based on the distance information from the TOF method distance image sensor and a person distinguishing section for distinguishing a person by specifying a shape of a detected distance change area to detect a direction and distance to the distance change area that is specified as a shape of a person as a location of a person.

Abstract: A system for supporting data analysis in a VLSI producing process is arranged to flexibly correspond to any data analysis requested by a system user. The system basically includes a registering unit for registering data in a database, an extracting unit for extracting necessary data from the registering unit, a processing unit for processing the extracted data, and a data statistical processing unit for producing statics from the extracted or processed data. In the registering unit, the data is stored as a collected data relation group for storing data and a common index information relation group for an index and a history of a processed wafer. Both of the relation groups are coupled through an index information key consisting of a process ID, a producing step ID, a lot ID and a wafer ID provided in both of the relation groups. In the extracting unit, two independent modules are provided so as to communicate one with another.