Abstract: A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.

Abstract: The present disclosure provides systems, devices, and methods for flow focusing in a microfluidic device. Flow focusing may be used in detection of objects, for example cells, in a stream of fluid passing through a fluidic device. The systems and devices may comprise a flow channel positioned between two sheath channels configured to direct fluid across the flow channel. Flow focusing microfluidic systems and devices disclosed herein may be robust to alignment errors. Systems and devices of the present disclosure may reduce the displacement of flow from the intended locations due to alignment errors. Also disclosed herein are methods for using such microfluidic systems and devices.

Abstract: A semiconductor manufacturing device includes a table having an upper face on which a frame having a first opening to which a substrate is fixed by an adhesive is disposed, the table having a plurality of first through holes penetrating the table in a vertical direction and provided side by side in a first direction parallel to the upper face and a plurality of second through holes each provided between the adjacent first through holes and penetrating the table in the vertical direction; and a container provided on the table, the container including a first sidewall provided on the frame, a second sidewall provided on the frame, the second sidewall facing the first sidewall, a distance between the second sidewall and the first sidewall being larger than a first inner diameter of the first opening, and a joint allowing an outside of the container and an inside of the container to communicate with each other.

Abstract: A flow cell of the flow cytometer of the present invention includes: a sample flow path through which a sample fluid containing a sample flows; and a sample fluid supply portion which communicates with an upstream end of the sample flow path in the sample fluid flow direction and supplies the sample fluid to the sample flow path, wherein the sample fluid supply portion includes a plurality of sample opening portions which supply a sample fluid to the sample flow path, a cleaning liquid supply opening portion to which a second tube is connectable and which supplies a cleaning liquid for cleaning the sample fluid supply portion, and a cleaning liquid discharge opening portion to which a first tube is connectable and which discharges the cleaning liquid from the sample fluid supply portion.

Abstract: A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.

Abstract: A method of evaluating performance of a flow cytometer configured to use a combination of two or more types of calibration particles having different morphologies from each other, includes a first classification step of classifying the calibration particles from each other based on a first optical characteristic by the flow cytometer which is an evaluation target, a second classification step of classifying the calibration particles from each other based on a second optical characteristic which is classifiable at a spatial resolution lower than a spatial resolution at which the first optical characteristic is classified, and the evaluation step of evaluating one or both of particle classification performance and a resolution of the flow cytometer based on a first classification result assessed in the first classification step and a second classification result assessed in the second classification step.

Abstract: A tire gripping device includes a chuck mechanism having a pair of chuck portions adjacent in a width direction of a tire and contact members disposed on each of the chuck portions in a circumferential manner. The contact members are able to be brought into contact with an open end portion of a bead portion of the tire. The contact members are able to enter a state of allowing relative movement with a contact surface of an open end portion in a first contact stage and enter a state of non-relative movement with the contact surface in a second contact stage subsequent to the first contact stage. The tire gripping device further includes a first driving mechanism for moving the contact members in a radial direction of the tire and a second driving mechanism for moving the pair of chuck portions in the width direction of the tire.

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract: A vibration device includes a vibration element that has a plurality of terminals, a base that has a plurality of electrical connection terminals, and a board that has a wiring portion which electrically connects the plurality of electrical connection terminal and the plurality of terminals to each other, and that supports the vibration element with respect to the base. The board has a base fixing portion fixed to the base, a vibration element mounting portion on which the vibration element is mounted, and at least one beam portion which couples the base fixing portion and the vibration element mounting portion to each other. At least the one beam portion has a first portion which extends in a first direction and a second portion which extends in a second direction intersecting the first direction.

Abstract: A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.

Abstract: A vibrator element includes a drive arm. The drive arm includes an upper surface, a lower surface, a groove opened to the upper surface, and a groove opened to the lower surface. The upper surface is disposed to be deviated by L1 on a +X axis side from the lower surface. The groove is disposed to be deviated by L2 on the +X axis side from the groove. L1 and L2 satisfy a relation of L2/L1>0.

Abstract: A gyro element includes a base section, vibrating arms connected to the base section, driving piezoelectric elements disposed on the vibrating arms and causing a flexural vibration in the drive vibration mode of X-axis in-phase and Z-axis inverse-phase, and detecting piezoelectric elements disposed on the vibrating arms and adapted to detect the angular velocity around the detection axis, and in a case of making the vibrating arms flexurally vibrate in the drive vibration mode, signals having respective phases reverse to each other are generated in the detecting piezoelectric elements, and in a case in which the angular velocity is applied while making the vibrating arms flexurally vibrate in the drive vibration mode, signals having respective phases the same as each other are generated in the detecting piezoelectric elements.

Abstract: A vibration device includes a vibration element that has a plurality of terminals, a base that has a plurality of electrical connection terminals, and a board that has a wiring portion which electrically connects the plurality of electrical connection terminal and the plurality of terminals to each other, and that supports the vibration element with respect to the base. The board has a base fixing portion fixed to the base, a vibration element mounting portion on which the vibration element is mounted, and at least one beam portion which couples the base fixing portion and the vibration element mounting portion to each other. At least the one beam portion has a first portion which extends in a first direction and a second portion which extends in a second direction intersecting the first direction.

Abstract: A vibrator element includes drive vibrating arms extending from an end of a base section, the drive vibrating arms are each provided with an obverse surface, a reverse surface disposed on an opposite side to the obverse surface, and a side surface connecting the obverse surface and the reverse surface to each other, a tilted section facing toward the obverse surface is disposed at least a part of the side surface, and there are disposed a first drive electrode and a second drive electrode obtained by bisection with an electrode separation section disposed in the tilted section.

Abstract: A gyro element as a resonator element includes a drive resonating arm as a drive portion that is driven by application of a voltage, and a detection resonating arm as a detection portion in which charge is generated in response to a Coriolis force generated in the drive resonating arm. An amount of charge detected in the detection resonating arm in a state where the Coriolis force is not generated is greater than 0% and equal to or less than 0.1% of an amount of charge generated in the drive resonating arm when driving the drive resonating arm.

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract: A tire gripping device includes a chuck mechanism having a pair of chuck portions adjacent in a width direction of a tire and contact members disposed on each of the chuck portions in a circumferential manner. The contact members are able to be brought into contact with an open end portion of a bead portion of the tire. The contact members are able to enter a state of allowing relative movement with a contact surface of an open end portion in a first contact stage and enter a state of non-relative movement with the contact surface in a second contact stage subsequent to the first contact stage. The tire gripping device further includes a first driving mechanism for moving the contact members in a radial direction of the tire and a second driving mechanism for moving the pair of chuck portions in the width direction of the tire.

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract: An vibrating gyro device includes a base, drive vibrating arms extending from one end of the base, and detection vibrating arms extending from the other end of the base that faces away from the one end, and an adjustment film is provided on each of the drive vibrating arms in an area close to the base.

Abstract: A vibrator element has a first vibration mode in which first and second detection portions perform flexural vibration in opposite directions in the opposite phase to first and second driving portions which vibrate in opposite directions according to a Coriolis force, and a second vibration mode in which the first and second detection portions perform flexural vibration in opposite directions in the same phase as the first and second driving portions which vibrate in opposite directions according to a Coriolis force. A ratio r=R2/R1 of equivalent series resistance R2 at the time of the second vibration mode to equivalent series resistance R1 at the time of the first vibration mode is set between 0.15 and 6.0.