Abstract: A plurality of compression chambers are formed between first and second spiral bodies 1 and 2, and refrigerant discharge timing advancing means is provided for advancing the timing at which refrigerant is discharged from a first compression chamber 4 which is one of a pair of compression chambers located nearest to the center, relative to the refrigerant discharge timing of the second compression chamber 5. The refrigerant discharge timing advancing means includes an extension 1c of the first spiral body 1 and an opening advancing portion 3a of a discharge port 3.

Abstract: An exposure apparatus includes a light source for providing pulse light, a mask scanner for scanning a mask having a pattern, a wafer scanner for projecting a wafer onto which the pattern is to be projected and a light emission period determining device. The mask scanner and the wafer scanner scan the mask and the wafer in a timed relation so that the mask is illuminated while superposing portions of an illumination region defined by the pulse light and being narrower than the pattern such that the pattern is lithographically transferred onto the wafer. The light emission period determining device determines a period of emission of the pulse light, prior to an actual exposure process, wherein the emission period can be changed in accordance with a required precision of an integrated exposure amount.

Abstract: An adsorbent for separating gases, which comprises a binder and a crystalline low-silica faujasite type zeolite with a SiO2/Al2O3 molar ratio of from 1.9 to 2.1, wherein the average pore diameter of the macropores is equal to or larger than the mean free path of an adsorbable component when desorbing the adsorbable component from the adsorbent, and at least 70% of the total volume of the macropores is occupied by macropores having a diameter equal to or larger than the mean free path of the adsorbable component.

Abstract: In a scroll compressor (A) configured such that an oil is supplied to a compression chamber (14) between fixed and movable scrolls (10), (11) and to bearings (28), (29) for a crank shaft (8), an electric motor (7) and an oil reservoir 1a are placed in a discharge chamber (22), a discharge port (11c) for discharging a gas compressed in the compression chamber (14) is formed in an end plate (11a) of the movable scroll (11), and the crank shaft (8) is provided at the inside thereof with a discharge gas passage (8e) for causing the gas discharged through the discharge port (11c) of the movable scroll (11) to flowinto the discharge chamber (22). The sucked gas is prevented from being heated by a heat loss of the electric motor (7) or the oil thereby increasing the performance of the compressor (A) and a rise in cost for separating the oil from the compressed gas can be prevented.

Abstract: This invention has an object of providing an air conditioner for a railway vehicle which can restrict a reduction in the introduced volume of outside air during a high-speed running of a vehicle and which can achieve lower noise. To achieve this object, the air conditioner for a railway vehicle includes an external cover 4 provided along the same surface as a vehicle surface, an air intake port 5 with a periphery provided on the external cover 4 and having a roundness in the cross-sectional configuration of an inside edge portion 12a of the intake port periphery, an air intake louver 11 disposed in the air intake port 5 to intersect a vehicle running direction, and an air exhaust port 3 for exhausting air that has been heat-exchanged, wherein an upper end surface 11a of the louver 11 is recessed from the surface of the exterior cover 4, and a cross-sectional configuration of the edge portion 11b of the upper end surface 11a has a roundness.

Abstract: A scroll compressor (A) includes a barrier wall (25) which divides the internal cavity of a casing (1) into a discharge chamber (22) and a suction chamber (23) and has a discharge opening (25b) for providing the communication of the compartments (22) and (23), a check valve (27) operable to prevent a flow of gas from the discharge chamber (22) into the suction chamber (23), and a scroll compression mechanism (3) which is provided in the suction chamber (23), which a space (36) left between the mechanism (3) and the barrier wall (25), for discharging compressed gas into the space (36). In addition, a valve (31) is provided in the space (36) which has a seal member (32) operable to interrupt the communication of an inner compartment (34) with an outer compartment (35) of the space (36) during the correct operation period while on the other hand providing the communication during the reverse operation period.

Abstract: An exposure apparatus and device manufacturing method having structure and steps for projecting, for scan exposure of a substrate through an original, a plurality of light pulses from a pulse light source to the substrate through the original, changing an emitted light intensity of light pulses from the pulse light source during the scan exposure, and changing timing of light emission from the pulse light source during the scan exposure, whereby both the emitted light intensity and the timing of light pulses may be controlled during the scan exposure.

Abstract: An exposure apparatus includes a mask scanning device for scanning a mask on which a pattern is formed, a projection optical system for projecting the pattern on the mask onto a wafer, a wafer scanning device for scanning the wafer, onto which the pattern is projected by the projection optical system, an illuminating device for illuminating the mask in an illumination area narrower than the pattern by synchronously scanning the mask and the wafer relative to each other, using the mask scanning device and the wafer scanning device, so as to expose and transfer the pattern on the wafer, a detection device for detecting information regarding exposure before exposing and transferring the pattern onto the wafer by the illuminating device and for producing detection results, and a display for displaying exposure information obtained from the detection results. Also disclosed are methods of manufacturing semiconductor devices, for example, using such an exposure apparatus.

Abstract: A scanning projection exposure apparatus includes an illumination optical system for illuminating an original with pulse light, a projection optical system for projecting a pattern of the original, illuminated with the pulse light, onto a substrate, a moving device for moving the original and the substrate relative to each other, a position measuring device for measuring a relative positional relation between the original and the substrate, and a controller for discriminating whether the positional relation measured by the position measuring device is in a predetermined range. The discrimination is performed within a period after the moving device initiates the relative movement of the original and the substrate and before the illumination optical system initiates the projection exposure with the pulse light. The controller stops the projection exposure with the pulse light from the illumination optical system when the positional relation is discriminated as being out of a predetermined range.

Abstract: An output control method for an excimer laser includes providing plural light pulses, and changing an emission interval for the light pulses, wherein the emission interval is controlled so that an average laser output of each light pulse becomes higher than that when the emission interval is unchanged.

Abstract: An adhesive tape which comprises a tape base material having stretchability and an adhesive mainly consists of a rubber having halogen or the nitrile groups in the molecule and having unsaturated bonds in the main chain, or added therein a second rubber having halogen in the molecule and having no unsaturated bond in the main chain and/or a blocked polyisocyanate, the adhesive being coated on a surface of the tape base material. This adhesive tape shows firm adhesion to almost all the industrial rubber, particularly to a vulcanized rubber and also has high elasticity of the coated film so that, by using this adhesive tape, sporting goods made of rubber having good stretchability can be produced without troublesome sewing and sealing procedures.

Abstract: A pulse nozzle of a reaction apparatus which obtains a very low temperature by expanding high-pressure and normal-temperature gas in heat insulation manner includes a fixed slit member disposed at an inlet of the nozzle and having a plurality of slit openings, a movable slit member having similar slit openings disposed along the fixed slit member, and two piezoelectric-crystal elements driven by an external pulse signal to slidably move the movable slit member with respect to the fixed slit member repeatedly to thereby open and close a flow of gas in the pulse manner. A plurality of the pulse nozzles are disposed in parallel to increase the capacity of the pulse nozzle.

Abstract: An air cleaner comprising a thin lightweight fan module having at least one fan, at least one casing containing one fan therein and at least one housing containing one casing therein; a thin lightweight air filter module having an air filter; and an air flow moderator disposed between the fan module and the air filter module.

Abstract: An air cleaner comprising a thin lightweight fan module having at least one fan, at least one casing containing one fan therein and at least one housing containing one casing therein; a thin lightweight air filter module having an air filter; and an air flow moderator disposed between the fan module and the air filter module.