Patents by Inventor Keiko Kuzawa

Keiko Kuzawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source, ion implantation apparatus, and ion implantation method
    Patent number: 7791041
    Abstract: This ion source generates a ribbon-like ion beam whose dimension in the Y direction is larger than the dimension in the X direction. This ion source includes a plasma generating vessel having an ion extraction port extending in the Y direction, a plurality of cathodes arranged in a plurality of stages along the Y direction on one side in the X direction in the plasma generating vessel, a reflecting electrode arranged on the other side in the X direction in the plasma generating vessel opposite to the cathodes, and electromagnets for generating magnetic fields along the X direction in regions including the plurality of cathodes in the plasma generating vessel.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: September 7, 2010
    Assignee: Nissin Ion Equipment Co., Ltd.
    Inventors: Takatoshi Yamashita, Tadashi Ikejiri, Keiko Kuzawa, Hideyuki Fujiwara
  • ION SOURCE, ION IMPLANTATION APPARATUS, AND ION IMPLANTATION METHOD
    Publication number: 20090078890
    Abstract: This ion source generates a ribbon-like ion beam whose dimension in the Y direction is larger than the dimension in the X direction. This ion source includes a plasma generating vessel having an ion extraction port extending in the Y direction, a plurality of cathodes arranged in a plurality of stages along the Y direction on one side in the X direction in the plasma generating vessel, a reflecting electrode arranged on the other side in the X direction in the plasma generating vessel opposite to the cathodes, and electromagnets for generating magnetic fields along the X direction in regions including the plurality of cathodes in the plasma generating vessel.
    Type: Application
    Filed: September 18, 2008
    Publication date: March 26, 2009
    Applicant: NISSIN ION EQUIPMENT CO., LTD.
    Inventors: Takatoshi Yamashita, Tadashi Ikejiri, Keiko Kuzawa, Hideyuki Fujiwara