Patents by Inventor Keiko Matsushita

Keiko Matsushita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask structure for lithography
    Patent number: 5112707
    Abstract: A mask structure for lithography including an annular base plate supporting a peripheral portion of a masking-material-holding film provided on a surface thereof with a desired pattern of the making material is provided which is characterized in that the masking-material-holding film and the base plate are bonded together at an outer peripheral surface, which is connected smoothly or with an appropriate angle to the topmost flat end surface of the base plate and is at a lower level than the topmost flat end surface of the base plate, or at a surface contiguous to the outer peripheral surface.
    Type: Grant
    Filed: June 8, 1990
    Date of Patent: May 12, 1992
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideo Kato, Hirohumi Shibata, Keiko Matsushita, Osamu Takamatsu
  • Mask structure for lithography
    Patent number: 4956249
    Abstract: A mask structure for lithography comprising an annular base plate supporting a peripheral portion of a masking-material-holding film provided on a surface thereof with a desired pattern of the masking material is provided which is characterized in that the masking-material-holding film and the base plate are bonded together at an outer peripheral surface, which is connected smoothly or with an appropriate angle to the topmost flat end surface of the base plate and is at a lower level than the topmost flat end surface of the base plate, or at a surface contiguous to the outer peripheral surface.
    Type: Grant
    Filed: August 25, 1989
    Date of Patent: September 11, 1990
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideo Kato, Hirohumi Shibata, Keiko Matsushita, Osamu Takamatsu