Patents by Inventor Keishi Kariya

Keishi Kariya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus
    Patent number: 11075062
    Abstract: A vacuum processing apparatus includes a heat receiving member having a heat receiving surface configured to receive heat from a heat source; and a coolant path formed within the heat receiving member along the heat receiving surface and configured to allow a coolant to flow therein. The coolant path has, at a pair of second inner wall surfaces intersecting with a first inner wall surface disposed near the heat receiving surface, a first groove extending in an inclined direction toward the first inner wall surface with respect to a flow direction of the coolant.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: July 27, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yun Mo, Yoshinobu Ohya, Akio Miyara, Keishi Kariya
  • VACUUM PROCESSING APPARATUS
    Publication number: 20200161105
    Abstract: A vacuum processing apparatus includes a heat receiving member having a heat receiving surface configured to receive heat from a heat source; and a coolant path formed within the heat receiving member along the heat receiving surface and configured to allow a coolant to flow therein. The coolant path has, at a pair of second inner wall surfaces intersecting with a first inner wall surface disposed near the heat receiving surface, a first groove extending in an inclined direction toward the first inner wall surface with respect to a flow direction of the coolant.
    Type: Application
    Filed: November 14, 2019
    Publication date: May 21, 2020
    Inventors: Yun Mo, Yoshinobu Ohya, Akio Miyara, Keishi Kariya