Patents by Inventor Keisuke Egashira

Keisuke Egashira has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10998186
    Abstract: Disclosed is a substrate processing apparatus including a dry processing unit and a controller. The dry processing unit includes: a chamber that accommodates the substrate; a supercritical processing liquid supply unit that supplies a supercritical processing liquid to the substrate; a heating unit that heats an inside of the chamber; and a discharge unit that discharges a fluid in the chamber from the chamber. The controller controls the supercritical processing liquid supply unit, the heating unit, and the discharge unit such that the supercritical processing liquid is supplied to the substrate before or after the substrate is accommodated in the chamber, the inside of the chamber is heated to change the supercritical processing liquid into a supercritical fluid or a subcritical fluid, and the supercritical fluid or the subcritical fluid is discharged from the chamber.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: May 4, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Gentaro Goshi, Keisuke Egashira
  • Patent number: 10986674
    Abstract: A communication processing system for a working machine, includes a communication device disposed on the working machine, the communication device having a first communicator to transmit a first beacon, and a mobile terminal having a second communicator to be connected to the communication device when receiving the first beacon, the communication device having transmitted the first beacon. The first communicator transmits a second beacon other than the first beacon to the mobile terminal connected to the communication device in accordance with the first beacon.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: April 20, 2021
    Assignee: KUBOTA CORPORATION
    Inventors: Keisuke Miura, Keisuke Egashira
  • Patent number: 10967834
    Abstract: An anti-theft system for a working machine, includes a communication device disposed on the working machine, the communication device having a first communicator, a mobile terminal having a storage to store authentication information, and a second communicator, and a control device disposed on the working machine, the control device having an authentication processor to execute an authentication processing that determines whether to provide a permission of driving a driving portion of the working machine based on the authentication information. The first communicator sends a beacon to the mobile terminal before the authentication processing of the authentication processor is executed. The second communicator sends the authentication information to the communication device after receiving the beacon, the authentication information being stored by the storage.
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: April 6, 2021
    Assignee: KUBOTA CORPORATION
    Inventors: Ryosuke Kinugawa, Keisuke Miura, Keisuke Egashira
  • Patent number: 10950465
    Abstract: Disclosed is a method of cleaning a substrate processing apparatus in which a substrate having a surface wet by a liquid is brought into contact with a supercritical fluid so as to perform a drying process of drying the substrate. The method includes a cleaning gas filling process and an exhausting process. The cleaning gas filling process fills a cleaning gas containing isopropyl alcohol in the substrate processing apparatus. The exhausting process exhausts the cleaning gas from an inside of the substrate processing apparatus after the cleaning gas filling process.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: March 16, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi, Hiroshi Marumoto, Takuro Masuzumi, Kento Tsukano, Hiromi Kiyose
  • Patent number: 10939355
    Abstract: A communication system for a working machine includes a communication device disposed on the working machine, and a mobile terminal to be connected to the communication device, the mobile terminal having a first application and a second application. The communication device has a first communication circuit to transmit, to the mobile terminal, a beacon including a first application identifier corresponding to the first application, and a second application identifier corresponding to the second application. And, the mobile terminal has a calculation circuit to execute the second application after the first application is activated.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: March 2, 2021
    Assignee: KUBOTA CORPORATION
    Inventors: Ryosuke Kinugawa, Keisuke Egashira, Keisuke Miura
  • Patent number: 10904819
    Abstract: A communication device for a working machine disposed on the working machine and configured to be connected to a mobile terminal, includes a first communication circuit to transmit, to the mobile terminal, an application identifier with a beacon conforming to Bluetooth Low Energy (a registered trademark) and to transmit data to the mobile terminal after the mobile terminal activates an application corresponding to an application identifier, the data relating to the working machine and corresponding to the application.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: January 26, 2021
    Assignee: KUBOTA CORPORATION
    Inventors: Ryosuke Kinugawa, Keisuke Egashira, Keisuke Miura
  • Patent number: 10904930
    Abstract: A communication device for a working machine disposed on the working machine and configured to be connected to a mobile terminal, includes an identifier setting circuit configured to set at least one of a first program identifier and a second program identifier, and a first communicating circuit configured to transmit, to the mobile terminal, the first program identifier set by the identifier setting circuit with a first beacon and the second program identifier set by the identifier setting circuit with a second beacon, the first communicating circuit being configured to transmit the second beacon to the mobile terminal while the mobile terminal executes a first program after receiving the first beacon, the first program corresponding to the first program identifier being included in the first beacon.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: January 26, 2021
    Assignee: KUBOTA CORPORATION
    Inventors: Ryosuke Kinugawa, Keisuke Egashira, Keisuke Miura
  • Publication number: 20200406858
    Abstract: An anti-theft system for a working machine, includes: a start-operation tool to issue an order to start a prime mover; an information obtaining device to obtain first information and second information; and a controller device having: a certification storage to store certification information; a start processor to obtain the order issued by the start-operation tool and to start the prime mover when the first information obtained by the information obtaining device is related to the certification information; and a registration processor to perform a registration process for registering the second information as the certification information. The registration processor allows the registration process before starting of the prime mover, and stops allowing the registration process after the starting of the prime mover.
    Type: Application
    Filed: June 9, 2020
    Publication date: December 31, 2020
    Applicant: KUBOTA CORPORATION
    Inventors: Ryo IKEDA, Keisuke EGASHIRA, Ryota ANDO
  • Patent number: 10867814
    Abstract: Disclosed is a liquid processing method of drying a substrate held horizontally after supplying deionized water to the substrate. The liquid processing method includes: supplying the deionized water to a front surface of the substrate; supplying a first solvent to the front surface of the substrate after supplying the deionized water; supplying a water-repellent agent to the front surface of the substrate to impart water-repellency to the front surface of the substrate; supplying a second solvent to the front surface of the substrate to which water-repellency is imparted; and removing the second solvent from the front surface of the substrate. A specific gravity of the first solvent is smaller than a specific gravity of the water-repellent agent, and a specific gravity of the second solvent is larger than the specific gravity of the water-repellent agent.
    Type: Grant
    Filed: February 14, 2017
    Date of Patent: December 15, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira, Koji Tanaka, Hiroaki Inadomi, Masami Yamashita, Yoshiteru Fukuda, Koji Yamashita, Yu Tsurifune, Takuro Masuzumi
  • Patent number: 10692739
    Abstract: A substrate processing apparatus according to an exemplary embodiment to the present disclosure includes: a main body which has therein a processing space capable of accommodating the substrate; a holding unit which holds the substrate in the main body; a supply unit which is provided at a side of the substrate held by the holding unit and supplies the processing fluid into the processing space; a discharge unit which discharges the processing fluid from an inside of the processing space; and a flow path limiting unit which limits a lower end of a flow path at an upstream side which is formed while the processing fluid flows from the supply unit to the discharge unit. Further, an upper end of the flow path limiting unit is disposed at a position higher than the upper surface of the substrate held by the holding unit.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: June 23, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto, Takuro Masuzumi, Kento Tsukano, Shotaro Kitayama
  • Publication number: 20200144052
    Abstract: Disclosed is a substrate processing apparatus including a dry processing unit and a controller. The dry processing unit includes: a chamber that accommodates the substrate; a supercritical processing liquid supply unit that supplies a supercritical processing liquid to the substrate; a heating unit that heats an inside of the chamber; and a discharge unit that discharges a fluid in the chamber from the chamber. The controller controls the supercritical processing liquid supply unit, the heating unit, and the discharge unit such that the supercritical processing liquid is supplied to the substrate before or after the substrate is accommodated in the chamber, the inside of the chamber is heated to change the supercritical processing liquid into a supercritical fluid or a subcritical fluid, and the supercritical fluid or the subcritical fluid is discharged from the chamber.
    Type: Application
    Filed: December 27, 2019
    Publication date: May 7, 2020
    Inventors: Gentaro Goshi, Keisuke Egashira
  • Patent number: 10576493
    Abstract: Provided is a substrate processing apparatus in which a drying process of drying a substrate using a processing fluid in a supercritical state is performed. The substrate processing apparatus includes: a processing container in which the drying process is performed; a discharge valve provided in a discharge flow path that discharges the processing fluid from the processing container; and a controller configured to control the discharge valve. When the inside of the processing container is decompressed from a first pressure at which the processing fluid is in the supercritical state to an atmospheric pressure, through a second pressure than the first pressure and a third pressure lower than the second pressure, the controller controls a valve opening degree of the discharge valve so that the decompression rate is equal from the second pressure to the third pressure.
    Type: Grant
    Filed: March 13, 2018
    Date of Patent: March 3, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Keisuke Egashira, Gentaro Goshi, Hiroshi Marumoto, Kento Tsukano
  • Patent number: 10566182
    Abstract: Disclosed is a substrate processing apparatus including a dry processing unit and a controller. The dry processing unit includes: a chamber that accommodates the substrate; a supercritical processing liquid supply unit that supplies a supercritical processing liquid to the substrate; a heating unit that heats an inside of the chamber; and a discharge unit that discharges a fluid in the chamber from the chamber. The controller controls the supercritical processing liquid supply unit, the heating unit, and the discharge unit such that the supercritical processing liquid is supplied to the substrate before or after the substrate is accommodated in the chamber, the inside of the chamber is heated to change the supercritical processing liquid into a supercritical fluid or a subcritical fluid, and the supercritical fluid or the subcritical fluid is discharged from the chamber.
    Type: Grant
    Filed: February 23, 2017
    Date of Patent: February 18, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Gentaro Goshi, Keisuke Egashira
  • Publication number: 20200020550
    Abstract: A substrate processing apparatus 1 includes a drying processing unit 17, a drain line L2, an acquisition device 75 and a determination unit 19C. The drying processing unit 17 is configured to perform, by bringing a supercritical fluid into contact with a substrate having a surface wet by a liquid to replace the liquid with the supercritical fluid, a drying processing on the substrate. The drain line L2 is provided in the drying processing unit 17, and configured to drain the fluid from the drying processing unit 17. The acquisition device 75 is provided on the drain line L2, and configured to acquire optical information upon the fluid drained from the drying processing unit 17. The determination unit 19C is configured to detect presence or absence of the liquid within the drying processing unit 17 based on the optical information acquired by the acquisition device 75.
    Type: Application
    Filed: March 13, 2018
    Publication date: January 16, 2020
    Inventors: Gentaro Goshi, Keisuke Egashira, Kento Tsukano, Hiroshi Marumoto
  • Patent number: 10504718
    Abstract: During at least part of a time period for a pressure increasing step of increasing a pressure inside a processing container from a pressure lower than a critical pressure of a processing fluid to a pressure higher than the critical pressure, pressure increasing is performed by supplying the processing fluid into the processing container from a fluid supply source while discharging the processing fluid from the processing container at a controlled discharge flow rate. Particles attached to the surfaces of members inside the processing container travel upward by the supply of the processing fluid into the processing container from the fluid supply source. The particles are discharged along with the processing fluid from the processing container.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: December 10, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Hiroki Ohno, Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama, Hiroshi Marumoto, Takuro Masuzumi, Kento Tsukano, Hiromi Kiyose
  • Patent number: 10395950
    Abstract: A substrate processing apparatus performs: a pressure raising process of raising a pressure within the processing container to a processing pressure higher than a critical pressure of the processing fluid, after the substrate is accommodated in the processing container; and a circulation process of supplying the processing fluid to the processing container and discharging the processing fluid from the processing container while keeping a pressure at which the processing fluid is maintained in the supercritical state, within the processing container. In the pressure raising process, the supply of the processing fluid from the second fluid supply unit is stopped and the processing fluid is supplied from the first fluid supply unit into the processing container until at least the pressure within the processing container reaches the critical pressure. In the circulation process, the processing fluid is supplied into the processing container from the second fluid supply unit.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: August 27, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Takuro Masuzumi, Hiroki Ohno, Kento Tsukano, Hiroshi Marumoto, Shotaro Kitayama
  • Patent number: 10366877
    Abstract: Disclosed is a substrate processing method including a first surface cleaning step of supplying a first cleaning liquid containing water to a first surface of a substrate; a second surface cleaning step of supplying a second cleaning liquid containing water to a second surface that is opposite to the first surface; a water removal step of removing the water remaining on the second surface of the substrate in a state where the first surface is not exposed to outside air, after the second surface cleaning step; a water-repellency step of supplying a water-repellent agent to the first surface of the substrate after the water removal step; and a drying step of drying the substrate after the water-repellency step.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: July 30, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Keisuke Egashira, Mitsunori Nakamori
  • Publication number: 20190200224
    Abstract: A communication system for a working machine includes a communication device disposed on the working machine, and a mobile terminal to be connected to the communication device. The communication device transmits a service universal unique identifier (UUID) to the mobile terminal. The mobile terminal transmits unique information to the communication device. The communication device issues connection request to the mobile terminal after receiving the unique information. The mobile terminal requests transmission of authentication information after issuing the connection request, the authentication information being used for paring. The communication device transmits the authentication information to the mobile terminal in response to the request. And, the mobile terminal judges whether the paring is established based on the authentication information, and executes a program based on the service universal unique identifier (UUID) when the paring is established.
    Type: Application
    Filed: December 19, 2018
    Publication date: June 27, 2019
    Applicant: KUBOTA CORPORATION
    Inventors: Ryosuke KINUGAWA, Keisuke EGASHIRA, Keisuke MIURA
  • Publication number: 20190200276
    Abstract: A communication device for a working machine disposed on the working machine and configured to be connected to a mobile terminal, includes a first communication circuit to transmit, to the mobile terminal, an application identifier with a beacon conforming to Bluetooth Low Energy (a registered trademark) and to transmit data to the mobile terminal after the mobile terminal activates an application corresponding to an application identifier, the data relating to the working machine and corresponding to the application.
    Type: Application
    Filed: December 19, 2018
    Publication date: June 27, 2019
    Applicant: KUBOTA CORPORATION
    Inventors: Ryosuke KINUGAWA, Keisuke EGASHIRA, Keisuke MIURA
  • Publication number: 20190200403
    Abstract: A communication device for a working machine disposed on the working machine and configured to be connected to a mobile terminal, includes an identifier setting circuit configured to set at least one of a first program identifier and a second program identifier, and a first communicating circuit configured to transmit, to the mobile terminal, the first program identifier set by the identifier setting circuit with a first beacon and the second program identifier set by the identifier setting circuit with a second beacon, the first communicating circuit being configured to transmit the second beacon to the mobile terminal while the mobile terminal executes a first program after receiving the first beacon, the first program corresponding to the first program identifier being included in the first beacon.
    Type: Application
    Filed: December 19, 2018
    Publication date: June 27, 2019
    Applicant: Kubota Corporation
    Inventors: Ryosuke KINUGAWA, Keisuke Egashira, Keisuke Miura