Abstract: This method is for conveying, in a processing system comprising at least one processing unit that performs a desired process on substrates and a conveyance unit that conveys the substrates to the processing unit, a plurality of substrates, which are to be continuously processed, from the conveyance unit to the processing unit. To each of the substrates, an adjustment value for optionally changing processing time is assigned in advance.

Abstract: A substrate processing apparatus having a plurality of processing modules connected to the substrate transfer chamber and including first and second processing modules configured to perform different types of processing. The apparatus also includes a substrate transfer mechanism performing a carry-in operation of an unprocessed substrate into the substrate transfer chamber, a carry-out operation and a transfer of the substrate between the modules, a dummy substrate holder configured to hold a plurality of dummy substrates, and a control part configured to perform an operation of continuously carrying the dummy substrates from the dummy substrate holder into the first processing module when a waiting time for which the first processing module waits for carry-in of the substrate exceeds a predetermined setting time.

Abstract: An air suction device for a toilet drainage channel, capable of good and silent toilet flushing. The air suction device (200) for the toilet drainage channel (5) has air suction means for sucking air from the toilet drainage channel (5) connected to the downstream side of a water sealing part (4) of a toilet body (1). The air suction means has an ejector (30) serving as a negative pressure generator and also has a suction tank (80) connected between the ejector (30) and the toilet drainage channel (5). The air suction device (200) further has a control device (C) for controlling both execution of a suction stroke in which the suction tank (80) exhausts air into the toilet drainage channel (5). The control device (C) executes the air suction stroke after the start of the supply of flush water to the bowl (2) of the toilet body (1) and then executes the air exhaust stroke before the completion of the supply of the flush water to the bowl (2).