Abstract: According to an embodiment, an article posture changing device includes: a first end effector configured to grasp a projected tag of an article by adsorption; an arm unit configured to support the first end effector and move the first end effector along at least a vertical direction; and a controller configured to control the arm unit and the first end effector to grasp the tag, lift the article upward, separate the article from a placement surface, change an angle of the article by weight thereof, move the article downward, place the article on the placement surface, and release the grasp of the tag.

Abstract: According to one embodiment, a holding device includes a suction device, a sucker, a light amount sensor, and a controller. The suction device is configured to suction gas. The sucker is configured to communicate with the suction device and to adhere to an object by suction of the suction device. The light amount sensor is configured to two-dimensionally detect an amount of light from the object. The controller is configured to control the suction device on the basis of information detected by the light amount sensor.

Abstract: According to an embodiment, an article posture changing device includes: a first end effector configured to grasp a projected tag of an article by adsorption; an arm unit configured to support the first end effector and move the first end effector along at least a vertical direction; and a controller configured to control the arm unit and the first end effector to grasp the tag, lift the article upward, separate the article from a placement surface, change an angle of the article by weight thereof, move the article downward, place the article on the placement surface, and release the grasp of the tag.

Abstract: According to one embodiment, an object holding apparatus includes a suction device, a suction pad, and a proximal sensor. The suction device is configured to suction gas. The suction pad is connected to the suction device, and is configured to hold an object based on suction by the suction device. The proximal sensor is configured to detect that the object is in close proximity to the suction pad. The suction device is controlled to perform suction when the proximal sensor detects that the object is in close proximity to the suction pad.

Abstract: According to one embodiment, a holding device includes a suction device, a sucker, a light amount sensor, and a controller. The suction device is configured to suction gas. The sucker is configured to communicate with the suction device and to adhere to an object by suction of the suction device. The light amount sensor is configured to two-dimensionally detect an amount of light from the object. The controller is configured to control the suction device on the basis of information detected by the light amount sensor.

Abstract: According to one embodiment, an object holding apparatus includes a suction device, a suction pad, and a proximal sensor. The suction device is configured to suction gas. The suction pad is connected to the suction device, and is configured to hold an object based on suction by the suction device. The proximal sensor is configured to detect that the object is in close proximity to the suction pad. The suction device is controlled to perform suction when the proximal sensor detects that the object is in close proximity to the suction pad.

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.