Abstract: An object of the invention relates to the fact that the alignment of the sample stage and the optical image can be adjusted with high accuracy, good operability, and high throughput by utilizing a low magnification optical image and a high magnification optical image. The invention relates to the fact that an alignment adjustment by a sample table alignment can be performed using a first processed optical image obtained by enlarging or reducing or changing a visual field of the optical image of the sample table holding the sample by digital processing, and that an alignment adjustment by an alignment point designation can be performed using a second processed optical image different from the first processed optical image. According to the invention, it is possible to adjust the alignment of the sample stage and the optical image with reference to the outer shape of the sample table and the feature points on the sample without taking out the sample table holding the sample from the sample chamber.

Abstract: An object of the invention relates to the fact that the alignment of the sample stage and the optical image can be adjusted with high accuracy, good operability, and high throughput by utilizing a low magnification optical image and a high magnification optical image. The invention relates to the fact that an alignment adjustment by a sample table alignment can be performed using a first processed optical image obtained by enlarging or reducing or changing a visual field of the optical image of the sample table holding the sample by digital processing, and that an alignment adjustment by an alignment point designation can be performed using a second processed optical image different from the first processed optical image. According to the invention, it is possible to adjust the alignment of the sample stage and the optical image with reference to the outer shape of the sample table and the feature points on the sample without taking out the sample table holding the sample from the sample chamber.

Abstract: There is implemented a scanning electron microscope or a charged-particle beam apparatus. The scanning electron microscope or the charged-particle beam apparatus is provided with a function capable of managing utilization states of a micro scale with ease. The utilization states include a radiation position and the number of utilizations. A map corresponding to the layout of cells on the micro cells is created. The apparatus user selects a cell on the micro scale as a cell to be actually used from cells displayed on the map. On the actual display, the number of utilizations is not displayed simply as numerical data. Instead, cells are displayed on the map in different colors each indicating a utilization state. In addition, the utilization states of the micro scale are classified properly into categories and each of the colors is assigned to one of the categories.