Abstract: A conductive film is formed to extend from a bottom and a sidewall of a recess formed in an interlayer insulating film onto a top surface of the interlayer insulating film. Dry etching of the conductive film is performed such that a portion of the conductive film remains on the bottom and sidewall of the recess. The dry etching is also performed such that a deposition film is formed on a top portion of the recess.

Abstract: An electric double layer capacitor includes a pair of collectors, a separator, a conductive coating film, a polarizable electrode, and an electrolyte solution. The separator is arranged between the collectors. The conductive coating film covers a surface of at least one of the collectors facing the separator. The polarizable electrode is formed as to be in contact with at least a surface of the conductive coating film facing the separator. Preferably, electrolyte solution has a fluorine-containing organic solvent, and is impregnated into the polarizable electrode. Preferably, the capacitor enables an operating voltage of 3.5 V or higher.

Abstract: A dental filler having the optical and/or mechanical properties satisfying the requirements to a dental material, a method for producing the dental filler, and a dental composite material containing the dental filler. The dental filler comprises microparticles of amorphous inorganic oxide constituted by at least silica-based fine particles covered with a composite oxide comprising zirconium, silicon and oxygen. The dental composite material contains the dental filler and a hardenable resin selected from an acrylic resin, a methacrylic resin, an epoxy resin, a vinyl resin and a urethane resin.

Abstract: Disclosed is a method of manufacturing a semiconductor device comprising: forming a first layer on a sidewall of a trench formed on a main surface of a semiconductor substrate, filling up the trench with a protective film, etching back the protective film by a dry etching method so that a height of a surface of the protective film is lower than an opening of the trench and removing the first layer exposed by the etching-back.

Abstract: A dental composition of the present invention includes: a polymerizable monomer (A); an amorphous filler (B) having an average particle size of 1 to 20 ?m and including silica-based fine particles and coatings of an oxide that cover the surfaces of the silica-based fine particles; and inorganic particles (C) having an average particle size of 0.1 to 1.0 ?m. The oxide contains a zirconium atom, a silicon atom, and an oxygen atom. It is preferable that the dental composition contain 50 to 400 parts by weight of the filler (B) and 100 to 400 parts by weight of the inorganic particles (C) per 100 parts by weight of the polymerizable monomer (A).

Abstract: A dental composition of the present invention includes: a polymerizable monomer component (A); and an amorphous filler (B) having an average particle size of 1 to 20 ?m and including silica-based fine particles and coatings of an oxide that cover the surfaces of the silica-based fine particles. The oxide contains a zirconium atom, a silicon atom, and an oxygen atom. The dental composition contains 20 to 500 parts by weight of the filler (B) per 100 parts by weight of the polymerizable monomer component (A). The dental composition has a viscosity of 10 to 800 Pa·s. It is preferable that the filler (B) contain spherical particles, and that the percentage of the spherical particles in the filler (B) be at least 60%.

Abstract: The present invention provides a dental composition exhibiting both an excellent light diffusion property and excellent transparency, and having high mechanical strength and surface smoothness and gloss after polishing as a cured product and good handling properties as a paste. The present invention is a dental composition including: a polymerizable monomer (A); and an amorphous powder (B). The amorphous powder (B) has an average particle size of 1 to 20 ?m, and includes silica-based fine particles and coatings of an oxide that cover the surfaces of the silica-based fine particles. The oxide contains a zirconium atom, a silicon atom, and an oxygen atom. The difference in refractive index between the cured product of the polymerizable monomer (A) and the amorphous powder (B) is 0.005 to 0.03.

Abstract: A conductive film is formed to extend from a bottom and a sidewall of a recess formed in an interlayer insulating film onto a top surface of the interlayer insulating film. Dry etching of the conductive film is performed such that a portion of the conductive film remains on the bottom and sidewall of the recess. The dry etching is also performed such that a deposition film is formed on a top portion of the recess.

Abstract: A dental filler having the optical and/or mechanical properties satisfying the requirements to a dental material, a method for producing the dental filler, and a dental composite material containing the dental filler. The dental filler comprises microparticles of amorphous inorganic oxide constituted by at least silica-based fine particles covered with a composite oxide comprising zirconium, silicon and oxygen. The dental composite material contains the dental filler and a hardenable resin selected from an acrylic resin, a methacrylic resin, an epoxy resin, a vinyl resin and a urethane resin.

Abstract: The present invention provides dental fillers having the optical and/or mechanical characteristics required to dental materials, a method of producing the same, and a dental composite material prepared with use of the dental filler. More specifically, the present invention provides a dental filler containing a zirconium silicate compound, especially a zirconium trisilicate compound with a wadeite type crystalline structure and having an average particle diameter in the range from 2 to 50,000 nm, a method of producing the same, a dental composite material containing the dental filler and a hardenable resin selected from an acrylic resin, a methacrylic resin, an epoxy resin, a vinyl resin, a urethane resin and the like.