Abstract: Provided is a cobalt compound represented by the following general formula (1): where R1 to R7 each independently represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 5 carbon atoms, a fluorine atom-containing alkyl group having 1 to 5 carbon atoms, a group represented by the following general formula (L-1), or a group represented by the following general formula (L-2); where R8 to R10 each independently represent an alkyl group having 1 to 5 carbon atoms, A1 and A2 each independently represent an alkanediyl group having 1 to 5 carbon atoms, and * represents a bonding site.

Abstract: The present invention includes a link mechanism including a movable member, a first coupling shaft, a first coupling member, a second coupling shaft, a second coupling member, and a third coupling shaft. When the movable member moves to a predetermined engagement position, a straight line connecting the first coupling shaft and the second coupling shaft to each other in a plane orthogonal the first coupling shaft and the second coupling shaft and a straight line connecting the second coupling shaft and the third coupling shaft to each other in a plane orthogonal the second coupling shaft and the third coupling shaft are orthogonal to each other.

Abstract: The present invention provides an amidinate compound represented by the following general formula (1) or a dimer compound thereof, and a method of producing a thin-film including using the compound as a raw material: where R1 and R2 each independently represent an alkyl group having 1 to 5 carbon atoms, R3 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, M represents a metal atom or a silicon atom, and “n” represents the valence of the atom represented by M, provided that at least one hydrogen atom of R1 to R3 is substituted with a fluorine atom.

Abstract: Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented by the following formula (1): where R1 and R2 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, L represents a group represented by the following formula (L-1) or (L-2), and M represents an indium atom or a gallium atom; where R11 and R12 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 5 carbon atoms, or an alkoxy group having 1 to 5 carbon atoms, and * represents a bonding position with M in the formula (1); where R21 to R23 each independently represent a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 5 carbon atoms, and * represents a bonding position with M in the formula (1), provided that R21 and R22 represent different groups.

Abstract: The present invention provides a ruthenium compound represented by the following general formula (1) or (2), a thin-film forming raw material containing the ruthenium compound, and a method of producing a thin-film including using the thin-film forming raw material: where R1 to R12 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorine atom-containing group, and “n” represents an integer from 0 to 2, provided that at least one of R1 to R12 represents the fluorine atom-containing group; where R13 to R17 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and a total number of the carbon atoms of R13 to R17 is 3 or more.

Abstract: A thin-film forming raw material contains a molybdenum compound represented by the following general formula (1), a method of forming a thin-film through use of the thin-film forming raw material, and a molybdenum compound having a specific structure: where R1 represents an alkyl group having 1 to 5 carbon atoms or a fluorine atom-containing alkyl group having 1 to 5 carbon atoms, L1 represents a group represented by the following general formula (L-1) or (L-2), and “n” represents an integer of from 1 to 4, provided that when “n” represents 4, R1 represents a fluorine atom-containing alkyl group having 1 to 5 carbon atoms; where R2 to R12 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorine atom-containing alkyl group having 1 to 5 carbon atoms, and * represents a bonding site.

Abstract: A conveyance device includes a fixed base having a large gear, a turning body supported by the fixed base via a bearing, two or more servomotors, a conveyance arm, and two or more speed reducers. The speed reducer includes a housing integrated with the turning body, a planetary carrier rotatably supported inside the housing, an internal gear provided inside the housing, a sun gear connected to an output shaft of the servomotor, a plurality of planetary gears arranged around the sun gear and rotatably supported by the planetary carrier, and an output gear rotating integrally with the planetary carrier. The planetary gear meshes with the sun gear and meshes with the internal gear. The output gear has a smaller diameter than that of the large gear and meshes with the large gear outside the large gear.

Abstract: Provided is a cobalt compound represented by the following general formula (1): where R1 to R7 each independently represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 5 carbon atoms, a fluorine atom-containing alkyl group having 1 to 5 carbon atoms, a group represented by the following general formula (L-1), or a group represented by the following general formula (L-2); where R8 to R10 each independently represent an alkyl group having 1 to 5 carbon atoms, A1 and A2 each independently represent an alkanediyl group having 1 to 5 carbon atoms, and * represents a bonding site.

Abstract: Provided is a thin-film forming raw material containing a compound represented by the following formula (1): in the formula (1), R1 to R5 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a group containing a fluorine atom, M represents a metal atom, and “n” represents a valence of the metal atom represented by M, provided that at least one of R2, R3, and R4 represents the group containing a fluorine atom.

Abstract: Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented by the following general formula (1): M(R1)x1[A1-N(R2)(R3)]y1 ??(1) in the formula (1), R1, R2, and R3 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms, A1 represents a linear or branched alkylene group having 1 to 5 carbon atoms, x1 represents an integer of from 0 to 2, y1 represents an integer of from 1 to 3, and M represents an indium atom or a zinc atom, provided that when M represents an indium atom, a compound in which x1 represents 2, y1 represents 1, and R1, R2, and R3 each represent a methyl group is excluded.

Abstract: Provided is an indium compound, which is represented by the following general formula (1): where R1 and R2 each independently represent, for example, an unsubstituted alkyl group having 1 to 5 carbon atoms, R3 and R4 each independently represent, for example, a hydrogen atom or an unsubstituted alkyl group having 1 to 5 carbon atoms, and A represents a group represented by the following general formula (L-1) or (L-2): where R11, R12, R13, R14, R21 and R22 each independently represent, for example, a hydrogen atom or an unsubstituted alkyl group having 1 to 5 carbon atoms, and represents a bonding position with C in the general formula (1).

Abstract: A workpiece conveying system for a transfer press machine includes: a beam provided to extend in a feed direction of a workpiece; and a plurality of workpiece conveying apparatus supported by the beam. The workpiece conveying apparatus each include: a feed device including a first carrier that is movable relative to the beam in the feed direction; a raising and lowering device including a second carrier that is movable relative to the first carrier in a raising and lowering direction; a clamp device including a third carrier that is movable relative to the second carrier in a clamp direction of the workpiece; and a workpiece holding tool, which is supported at a distal end of the third carrier, and is configured to hold and release the workpiece.

Abstract: The present invention provides an amidinate compound represented by the following general formula (1) or a dimer compound thereof, and a method of producing a thin-film including using the compound as a raw material: where R1 and R2 each independently represent an alkyl group having 1 to 5 carbon atoms, R3 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, M represents a metal atom or a silicon atom, and “n” represents the valence of the atom represented by M, provided that at least one hydrogen atom of R1 to R3 is substituted with a fluorine atom.

Abstract: Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented, by the following formula (1) : where R1 and R2 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, L represents a group represented by the following formula (L-1) or (L-2), and M represents an indium atom or a gallium atom; where R11 and R12 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 5 carbon atoms, or an alkoxy group having 1 to 5 carbon atoms, and * represents a bonding position with M in the formula (1); where R21 to R23 each independently represent a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 5 carbon atoms, and * represents a bonding position with M in the formula (1), provided that R21 and R22 represent different groups.

Abstract: Provided is a zinc compound represented by the following general formula (1) or (2): in the formula (1), R1 represents an unsubstituted alkyl group having 1 to 5 carbon atoms, etc., R2 and R5 each independently represent a hydrogen atom, a fluorine atom, an unsubstituted alkyl group having 1 to 5 carbon atoms, etc., and R3 and R4 each independently represent a hydrogen atom, a fluorine atom, an unsubstituted alkyl group having 1 to 5 carbon atoms, etc.; in the formula (2), R10, R11, R14, and R15 each independently represent a hydrogen atom, a fluorine atom, an unsubstituted alkyl group having 1 to 5 carbon atoms, etc., and R9, R12, R13, and R16 each independently represent a hydrogen atom, a fluorine atom, an unsubstituted alkyl group having 1 to 5 carbon atoms, etc.

Abstract: Provided is a workpiece conveying system configured to convey a sheet-like workpiece to a downstream step, including: a workpiece conveyor configured to lift through attraction holding, by a workpiece holding unit, an uppermost workpiece W of a stack, and convey the uppermost workpiece W of the stack to the downstream step one by one; and a conveyed workpiece number detector configured to detect the number of workpieces W held by the workpiece holding unit at a detection timing, at which the workpiece W held and raised by the workpiece holding unit in accordance with a normal workpiece conveying operation performed by the workpiece conveyor reaches an upper limit position of raising the workpiece W, and at which a moving speed component of the workpiece W in a raising direction is 0.

Abstract: The present invention includes a link mechanism including a movable member, a first coupling shaft, a first coupling member, a second coupling shaft, a second coupling member, and a third coupling shaft. When the movable member moves to a predetermined engagement position, a straight line connecting the first coupling shaft and the second coupling shaft to each other in a plane orthogonal the first coupling shaft and the second coupling shaft and a straight line connecting the second coupling shaft and the third coupling shaft to each other in a plane orthogonal the second coupling shaft and the third coupling shaft are orthogonal to each other.

Abstract: Provided is a thin-film forming raw material containing a compound represented by the following formula (1): in the formula (1), R1 to R5 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a group containing a fluorine atom, M represents a metal atom, and “n” represents a valence of the metal atom represented by M, provided that at least one of R2, R3, and R4 represents the group containing a fluorine atom.

Abstract: The present invention provides a ruthenium compound represented by the following general formula (1) or (2), a thin-film forming raw material containing the ruthenium compound, and a method of producing a thin-film including using the thin-film forming raw material: where R1 to R12 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorine atom-containing group, and “n” represents an integer from 0 to 2, provided that at least one of R1 to R12 represents the fluorine atom-containing group; where R13 to R17 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and a total number of the carbon atoms of R11 to R17 is 3 or more.

Abstract: A workpiece conveyance device includes a base body disposed adjacent to a press machine, a pair of first arms, a pair of second arms, and a first holding portion and a second holding portion independent of each other. Each of the first holding portion and the second holding portion includes a plurality of holding members configured to hold a workpiece W. The first holding portion includes a first support member, a second support member, and an absorption member. The second support member movably supports the first support member along an intersection direction. The absorption member allows movement of the second support member caused in the intersection direction relative to the first support member, and makes it possible for the second support member to return to an initial position in the intersection direction relative to the first support member.