Patents by Inventor Keita FUCHIGAMI

Keita FUCHIGAMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DRY ICE CLEANING APPARATUS FOR SEMICONDUCTOR WAFERS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
    Publication number: 20240332036
    Abstract: An object of the present invention is to provide a dry ice cleaning apparatus for a semiconductor wafer and a method for cleaning a semiconductor wafer that can reduce the amount of particles remaining on the surface of a semiconductor wafer, suppress a decrease of cleaning effects due to ice formation, and continuously and effectively clean a large amount of semiconductor wafers.
    Type: Application
    Filed: November 14, 2022
    Publication date: October 3, 2024
    Inventors: Yoshiki YANO, Keita FUCHIGAMI