Patents by Inventor Keita IDENO
Keita IDENO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11049688Abstract: A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.Type: GrantFiled: September 27, 2019Date of Patent: June 29, 2021Assignee: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Keita Ideno, Kota Iwasaki, Keisuke Goto, Kiyoshi Nakaso, Shintaro Yamamoto, Hitoshi Matsushita, Ryota Inoue, Yuki Fukuda
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Patent number: 10867769Abstract: A vacuum apparatus according to an embodiment includes a chamber configured air-tightly, a vacuum pump configured to exhaust gas from the chamber, and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure. The vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure. A layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.Type: GrantFiled: May 31, 2019Date of Patent: December 15, 2020Assignee: NuFlare Technology, Inc.Inventors: Keita Ideno, Tetsuro Nishiyama, Hiroyasu Saito
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Publication number: 20200105499Abstract: A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.Type: ApplicationFiled: September 27, 2019Publication date: April 2, 2020Applicant: NuFlare Technology, Inc.Inventors: Michihiro KAWAGUCHI, Kiminobu AKENO, Keita IDENO, Kota IWASAKI, Keisuke GOTO, Kiyoshi NAKASO, Shintaro YAMAMOTO, Hitoshi MATSUSHITA, Ryota INOUE, Yuki FUKUDA
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Patent number: 10607810Abstract: The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.Type: GrantFiled: January 2, 2019Date of Patent: March 31, 2020Assignee: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Kiyoshi Nakaso, Keita Ideno, Shintaro Yamamoto, Keisuke Goto, Hitoshi Matsushita, Hirokazu Yoshioka, Ryouta Inoue, Yuuki Fukuda
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Publication number: 20190371567Abstract: A vacuum apparatus according to an embodiment includes a chamber configured air-tightly, a vacuum pump configured to exhaust gas from the chamber, and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure. The vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure. A layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.Type: ApplicationFiled: May 31, 2019Publication date: December 5, 2019Applicant: NuFlare Technology, Inc.Inventors: Keita IDENO, Tetsuro NISHIYAMA, Hiroyasu SAITO
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Publication number: 20190214224Abstract: The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.Type: ApplicationFiled: January 2, 2019Publication date: July 11, 2019Applicant: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Kiyoshi Nakaso, Keita Ideno, Shintaro Yamamoto, Keisuke Goto, Hitoshi Matsushita, Hirokazu Yoshioka, Ryouta Inoue, Yuuki Fukuda
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Patent number: 9466465Abstract: A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit.Type: GrantFiled: March 31, 2015Date of Patent: October 11, 2016Assignee: NuFlare Technology, Inc.Inventor: Keita Ideno
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Publication number: 20160203949Abstract: A charged particle beam drawing apparatus has a vacuum container including a bottom plate, the bottom plate including a curved portion curved externally and a plurality of supporting portions disposed on an outer periphery of the curved portion, a stage provided in the vacuum container and having a target object mounted on the stage, a stage actuator supported by the supporting portions in the vacuum container and to move the stage, a two dimensional scale provided on a lower surface of the stage, a detector disposed under the two dimensional scale and detecting a position of the stage by the two dimensional scale, and a support body including a plurality of end portions individually attached to the supporting portions, and to support the detector across the curved portion.Type: ApplicationFiled: January 5, 2016Publication date: July 14, 2016Applicant: NuFlare Technology, Inc.Inventors: Hiroyasu SAITO, Keita IDENO
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Publication number: 20150311036Abstract: A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel. and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit.Type: ApplicationFiled: March 31, 2015Publication date: October 29, 2015Applicant: NuFlare Technology, Inc.Inventor: Keita IDENO