Abstract: A wafer placement table includes a ceramic plate, a cooling plate and a refrigerant flow path. The refrigerant flow path has a first variable section and a second variable section. The first variable section is provided such that the cross-sectional area of the refrigerant flow path gradually decreases as it proceeds in the direction of refrigerant flow from a starting point of the first variable section. The second variable section is provided such that, after the cross-sectional area of the refrigerant flow path is once expanded from the cross-sectional area of the refrigerant flow path at an end point of the first variable section in a first expansion section right before a starting point of the second variable section, the cross-sectional area of the refrigerant flow path gradually decreases as it proceeds in the direction of refrigerant flow from the starting point of the second variable section.

Abstract: A wafer placement table includes: a ceramic plate having a wafer placement surface on its upper surface; a cooling plate provided on a lower surface of the ceramic plate; and a refrigerant flow path provided inside the cooling plate, wherein the refrigerant flow path includes a first portion and a second portion, the second portion continuing from the first portion and being divided into two or more ways forming branches that run side by side, and wherein the first portion has a cross-sectional area smaller than a sum of cross-sectional areas of the respective branches included in the second portion.

Abstract: A method or apparatus to produce an L-shaped pressed component includes, where a portion of a blank, having tensile strength of 1180 MPa or more, is held in a state of being clamped by a blank holder and a die, and a portion of the blank, to be formed into a top plate is held in a state of being clamped by a pad and a punch; the second step where a vertical wall, a concave ridge and a flange on the inner side of a curved portion are formed by, bend forming with a bending die, forming one, two or more material inflow promoting portion; and the third step where the die is moved in a direction toward a side where the blank holder is disposed to form a vertical wall, a concave ridge, and a flange on the outer side of the curved portion by draw forming.

Abstract: To produce an L-shaped pressed component without causing occurrence of wrinkles or cracks through first to third steps: the first step where a portion of a blank 8, having tensile strength of 1180 MPa or more, to be formed into a portion disposed outward of a curved portion is held in a state of being clamped by a blank holder 73 and a die 71, and a portion of the blank 8 to be formed into a top plate 11 is held in a state of being clamped by a pad 74 and a punch 72; the second step where a vertical wall 14, a concave ridge 17 and a flange 15 on the inner side of a curved portion 1a are formed by bend forming with a bending die 75, thus forming one, two or more material inflow promoting portion, which increases an inflow amount of the blank 8 flowing into a portion to be formed into the flange 15 on the inner side of the curved portion 1a, in the vicinity of a portion of the blank 8 to be formed into the flange 15 on the inner side of the curved portion 1a of the pressed component 1; and the third step where