Abstract: A light source unit of the present invention includes: a board, and a plurality of light source areas formed by a plurality of LED elements mounted on the board, wherein each of the light source areas is provided with a plurality of LED element groups connected in parallel, each of the LED element groups being composed of a plurality of the LED elements connected in series, and at least one of the light source areas is a single-wavelength light source area in which all of the LED elements emit light having substantially a same peak wavelength.

Abstract: An optical heating device for heating a substrate includes: a chamber for accommodating the substrate; a pair of transmissive windows disposed on the wall of the chamber, the transmissive window facing each other for allowing light for heating to enter inside the chamber; a support member for supporting the substrate to face each of the main surfaces of the substrate and the pair of transmissive windows each other; a plurality of LED elements for emitting light toward the substrate supported by the support member; a flash lamp for emitting light toward the substrate supported by the support member; and a first lighting control unit for controlling the lighting of the flash lamp after a predetermined time has elapsed since the time of lighting the LED elements.

Abstract: A heating device in which uniform heating of an article to be processed is possible even in the case a temperature change which leads to a loss of the uniformity of the temperature distribution in a narrowly delineated area, and in which a reduction in the size of the device is possible. The heating device has a plurality of heaters, each heater having a single bulb of transparent material in which there is a filament that is divided in the axial direction into several filament parts and the respective filament parts are supplied with power independently of each other.

Abstract: A heating device in which uniform heating of an article to be processed is possible even in the case a temperature change which leads to a loss of the uniformity of the temperature distribution in a narrowly delineated area, and in which a reduction in the size of the device is possible. The heating device has a plurality of heaters, each heater having a single bulb of transparent material in which there is a filament that is divided in the axial direction into several filament parts and the respective filament parts are supplied with power independently of each other.