Patents by Inventor Keith A. Nugent

Keith A. Nugent has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Condenser for ring-field deep ultraviolet and extreme ultraviolet lithography
    Patent number: 6398374
    Abstract: A condenser for use with a ring-field deep ultraviolet or extreme ultraviolet lithography system. A condenser includes a ripple-plate mirror which is illuminated by a collimated or converging beam at grazing incidence. The ripple plate comprises a flat or curved plate mirror into which is formed a series of channels along an axis of the mirror to produce a series of concave surfaces in an undulating pattern. Light incident along the channels of the mirror is reflected onto a series of cones. The distribution of slopes on the ripple plate leads to a distribution of angles of reflection of the incident beam. This distribution has the form of an arc, with the extremes of the arc given by the greatest slope in the ripple plate. An imaging mirror focuses this distribution to a ring-field arc at the mask plane.
    Type: Grant
    Filed: March 14, 2000
    Date of Patent: June 4, 2002
    Assignee: The Regents of the University of California
    Inventors: Henry N. Chapman, Keith A. Nugent
  • Condenser for ring-field deep-ultraviolet and extreme-ultraviolet lithography
    Patent number: 6186632
    Abstract: A condenser for use with a ring-field deep ultraviolet or extreme ultraviolet lithography system. A condenser includes a ripple-plate mirror which is illuminated by a collimated beam at grazing incidence. The ripple plate comprises a plate mirror into which is formed a series of channels along an axis of the mirror to produce a series of concave surfaces in an undulating pattern. Light incident along the channels of the mirror is reflected onto a series of cones. The distribution of slopes on the ripple plate leads to a distribution of angles of reflection of the incident beam. This distribution has the form of an arc, with the extremes of the arc given by the greatest slope in the ripple plate. An imaging mirror focuses this distribution to a ring-field arc at the mask plane.
    Type: Grant
    Filed: December 31, 1998
    Date of Patent: February 13, 2001
    Assignee: The Regents of the University of California
    Inventors: Henry N. Chapman, Keith A. Nugent