Patents by Inventor Keith Cheng

Keith Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11901186
    Abstract: Disclosed is a method of reducing surface unevenness of a semiconductor wafer (100). In a preferred embodiment, the method comprises: removing a portion of a deposited layer and a protective layer thereon using a first slurry to provide an intermediate surface (1123). In the described embodiment, the deposited layer includes an epitaxial layer (112) and the protective layer includes a first dielectric layer (113). The first slurry includes particles with a hardness level the same as or exceeding that of the epitaxial layer (112). A slurry for use in wafer fabrication for reducing surface unevenness of a semiconductor wafer is also disclosed.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: February 13, 2024
    Assignees: Massachusetts Institute of Technology, Nanyang Technological University, National University of Singapore
    Inventors: Li Zhang, Kwang Hong Lee, Keith Cheng Yeow Ng, Kenneth Eng Kian Lee, Eugene A. Fitzgerald, Soo Jin Chua, Chuan Seng Tan
  • Publication number: 20200388501
    Abstract: Disclosed is a method of reducing surface unevenness of a semiconductor wafer (100). In a preferred embodiment, the method comprises: removing a portion of a deposited layer and a protective layer thereon using a first slurry to provide an intermediate surface (1123). In the described embodiment, the deposited layer includes an epitaxial layer (112) and the protective layer includes a first dielectric layer (113). The first slurry includes particles with a hardness level the same as or exceeding that of the epitaxial layer (112). A slurry for use in wafer fabrication for reducing surface unevenness of a semiconductor wafer is also disclosed.
    Type: Application
    Filed: February 19, 2019
    Publication date: December 10, 2020
    Applicants: Massachusetts Institute of Technology, Nanyang Technological University, National University of Singapore
    Inventors: Li Zhang, Kwang Hong Lee, Keith Cheng Yeow Ng, Kenneth Eng Kian Lee, Eugene A. Fitzgerald, Soo Jin Chua, Chuan Seng Tan
  • Publication number: 20180064347
    Abstract: Systems comprising a combination of the handheld imaging system with a nanoparticle multimodal contrast agent are disclosed. The imaging system exploits the advantages of both near-infrared emission and the photoacoustic effect by employing calcium phosphosilicate nanocolloid that encapsulates NIR and CT/MRI contrast agents for enhanced deep tissue imaging as well as a portable NIR/PA system using a tunable pulsed laser, CCD imaging technology and acoustic transducer arrays. Methods for using the system, for example in rapid diagnosis of trauma such as that inflicted on a battlefield, are provided.
    Type: Application
    Filed: September 8, 2017
    Publication date: March 8, 2018
    Inventors: JAMES H. ADAIR, SEAN D. KNECHT, J. ERIC BOYER, RICHARD L. TUTWILER, CONNOR CARR, XIAOMENG TANG, BERNADETTE M. ADAIR, THOMAS NEUBERGER, WELLEY S. LOC, ZACHARY R. WILCZYNSKI, CHRISTOPHER MCGOVERN, GAIL L. MATTERS, KEITH CHENG, MARK KESTER, LAWRENCE SINOWAY
  • Patent number: 9513233
    Abstract: Systems and methods are provided for staining tissue with multiple biologically specific heavy metal stains and then performing X-ray imaging, either in projection or tomography modes, using either a plurality of illumination energies or an energy sensitive detection scheme. The resulting energy-weighted measurements can then be used to decompose the resulting images into quantitative images of the distribution of stains. The decomposed images may be false-colored and recombined to make virtual X-ray histology images. The techniques thereby allow for effective differentiation between two or more X-ray dyes, which had previously been unattainable in 3D imaging, particularly 3D imaging of features at the micron resolution scale. While techniques are described in certain example implementations, such as with microtomography, the techniques are scalable to larger fields of view, allowing for use in 3D color, X-ray virtual histology of pathology specimens.
    Type: Grant
    Filed: October 29, 2012
    Date of Patent: December 6, 2016
    Assignees: THE UNIVERSITY OF CHICAGO, THE PENN STATE RESEARCH FOUNDATION, UCHICAGO ARGONNE, LLC
    Inventors: Patrick La Riviere, Yuxin Steve Wang, Darin Clark, Keith Cheng