Patents by Inventor Keith David Fenstermacher

Keith David Fenstermacher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Blanket resist to protect active side of semiconductor
    Patent number: 7572735
    Abstract: Yield loss in semiconductor processing is mitigated by forming a resist over an active side of a semiconductor workpiece or wafer, as well as around the edge of the wafer. The resist mitigates the creation of contaminants, such as nitride flakes, for example, that can develop when an oxide, nitride, oxide (ONO) layer is removed from the back or in-active side of the wafer. In the absence of the resist, such flakes may migrate to the front or active side of the wafer and cause defects to form therein, which can result in yield loss.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: August 11, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Scott Cuong Nguyen, Keith David Fenstermacher, David Michael Smith, Courtney Michael Hazelton
  • Blanket resist to protect active side of semiconductor
    Publication number: 20080076254
    Abstract: Yield loss in semiconductor processing is mitigated by forming a resist over an active side of a semiconductor workpiece or wafer, as well as around the edge of the wafer. The resist mitigates the creation of contaminants, such as nitride flakes, for example, that can develop when an oxide, nitride, oxide (ONO) layer is removed from the back or in-active side of the wafer. In the absence of the resist, such flakes may migrate to the front or active side of the wafer and cause defects to form therein, which can result in yield loss.
    Type: Application
    Filed: September 27, 2006
    Publication date: March 27, 2008
    Inventors: Scott Cuong Nguyen, Keith David Fenstermacher, David Michael Smith, Courtney Michael Hazelton