Patents by Inventor Keith E. Zawadzki

Keith E. Zawadzki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240145383
    Abstract: An integrated circuit structure includes a device layer including a first set of devices and a second set of devices. An interconnect layer is above the device layer, where the interconnect layer includes one or more conductive interconnect features within dielectric material. In an example, a first ring structure including conductive material extends within the interconnect layer, and a second ring structure including conductive material extends within the interconnect layer. In an example, the second ring structure is non-overlapping with the first ring structure. In an example, the first ring structure is above the first set of devices of the device layer, and the second ring structure is above the second set of devices of the device layer.
    Type: Application
    Filed: October 27, 2022
    Publication date: May 2, 2024
    Applicant: Intel Corporation
    Inventors: June Choi, Keith E. Zawadzki, Kimberly L. Pierce, Mohammad Enamul Kabir
  • Publication number: 20240145410
    Abstract: Moisture hermetic guard ring structures for semiconductor devices, related systems, and methods of fabrication are disclosed. Such devices systems, and methods include a guard ring structure laterally surrounding semiconductor devices of a device layer and metal interconnects of an interconnect layer, the guard ring structure extending through the interconnect layer, the device layer, and a bonding layer adjacent one of the interconnect layer or the device layer the bonding layer, and contacting a support substrate coupled to the bonding layer. Such devices systems, and methods may further include via structures having the same material system as the guard ring structure and also extending through the interconnect, the device, and bonding layers and contacting a support substrate.
    Type: Application
    Filed: January 4, 2024
    Publication date: May 2, 2024
    Applicant: Intel Corporation
    Inventors: Mohammad Kabir, Conor P. Puls, Babita Dhayal, Han Li, Keith E. Zawadzki, Hannes Greve, Avyaya Jayanthinarasimham, Mukund Bapna, Doug B. Ingerly
  • Publication number: 20210407932
    Abstract: Moisture hermetic guard ring structures for semiconductor devices, related systems, and methods of fabrication are disclosed. Such devices systems, and methods include a guard ring structure laterally surrounding semiconductor devices of a device layer and metal interconnects of an interconnect layer, the guard ring structure extending through the interconnect layer, the device layer, and a bonding layer adjacent one of the interconnect layer or the device layer the bonding layer, and contacting a support substrate coupled to the bonding layer. Such devices systems, and methods may further include via structures having the same material system as the guard ring structure and also extending through the interconnect, the device, and bonding layers and contacting a support substrate.
    Type: Application
    Filed: June 26, 2020
    Publication date: December 30, 2021
    Applicant: Intel Corporation
    Inventors: Mohammad Kabir, Conor P. Puls, Babita Dhayal, Han Li, Keith E. Zawadzki, Hannes Greve, Avyaya Jayanthinarasimham, Mukund Bapna, Doug B. Ingerly
  • Patent number: 7598142
    Abstract: A CMOS device having dual-epi channels comprises a first epitaxial region formed on a substrate, a PMOS device formed on the first epitaxial region, a second epitaxial region formed on the substrate, wherein the second epitaxial region is formed from a different material than the first epitaxial region, an NMOS device formed on the second epitaxial region, and electrical contacts coupled to the PMOS and NMOS devices, wherein the electrical contacts are self-aligned.
    Type: Grant
    Filed: March 15, 2007
    Date of Patent: October 6, 2009
    Inventors: Pushkar Ranade, Keith E. Zawadzki
  • Publication number: 20090085097
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include removing residual dielectric material from a metal gate structure, and then forming a stress relief layer on a top surface and on a sidewall region of the metal gate structure. A stress is introduced into a channel region disposed beneath the metal gate structure.
    Type: Application
    Filed: September 27, 2007
    Publication date: April 2, 2009
    Inventors: Lucian Shifren, Keith E. Zawadzki
  • Publication number: 20090011581
    Abstract: Carbon may be implanted into a p-type silicon channel to form a carbon region in an n-type metal oxide semiconductor (NMOS) transistor. After an annealing process, the implanted carbon may diffuse from the channel into an interface of a gate dielectric layer and the channel. The diffusion may cause an increase in fixed charge at the silicon surface. Thus, the threshold voltage of the NMOS transistor may be reduced.
    Type: Application
    Filed: September 17, 2008
    Publication date: January 8, 2009
    Inventors: Cory E. Weber, Keith E. Zawadzki
  • Publication number: 20080227250
    Abstract: A CMOS device having dual-epi channels comprises a first epitaxial region formed on a substrate, a PMOS device formed on the first epitaxial region, a second epitaxial region formed on the substrate, wherein the second epitaxial region is formed from a different material than the first epitaxial region, an NMOS device formed on the second epitaxial region, and electrical contacts coupled to the PMOS and NMOS devices, wherein the electrical contacts are self-aligned.
    Type: Application
    Filed: March 15, 2007
    Publication date: September 18, 2008
    Inventors: Pushkar Ranade, Keith E. Zawadzki
  • Publication number: 20040262683
    Abstract: Optimal strain in the channel region of a PMOS transistor is provided by silicon alloy material in the junction regions of the device in a non-planar relationship with the surface of the substrate. The silicon alloy material, the dimensions of the silicon alloy material, as well as the non-planar relationship of the silicon alloy material with the surface of the substrate are selected so that the difference between the lattice spacing of the silicon alloy material and of the substrate causes strains in the silicon alloy material below the substrate surface, as well as above the substrate surface, to affect an optimal silicon alloy induced strain in the substrate channel. In addition, the non-planar relationship may be selected so that any strains caused by different lattice spaced layers formed over the silicon alloy material have a reduced effect on the strain in the channel region.
    Type: Application
    Filed: June 27, 2003
    Publication date: December 30, 2004
    Inventors: Mark T. Bohr, Tahir Ghani, Stephen Cea, Kaizad Mistry, Christopher P. Auth, Mark Armstrong, Keith E. Zawadzki