Patents by Inventor Keith John Hansen

Keith John Hansen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fault detection apparatuses and methods for fault detection of semiconductor processing tools
    Patent number: 8791714
    Abstract: Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool includes sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
    Type: Grant
    Filed: January 23, 2012
    Date of Patent: July 29, 2014
    Assignee: Novellus Systems, Inc.
    Inventor: Keith John Hansen
  • FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMICONDUCTOR PROCESSING TOOLS
    Publication number: 20120123737
    Abstract: Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool includes sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
    Type: Application
    Filed: January 23, 2012
    Publication date: May 17, 2012
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventor: Keith John Hansen
  • Fault detection apparatuses and methods for fault detection of semiconductor processing tools
    Patent number: 8120376
    Abstract: Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool includes sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
    Type: Grant
    Filed: December 12, 2007
    Date of Patent: February 21, 2012
    Assignee: Novellus Systems, Inc.
    Inventor: Keith John Hansen
  • FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMICONDUCTOR PROCESSING TOOLS
    Publication number: 20090153144
    Abstract: Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool comprises sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
    Type: Application
    Filed: December 12, 2007
    Publication date: June 18, 2009
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventor: Keith John HANSEN