Abstract: An electrostatic chuck for a substrate processing system includes a monolithic body made of ceramic. A plurality of first electrodes are arranged in the monolithic body adjacent to a top surface of the monolithic body and that are configured to selectively receive a chucking signal. A gas channel is formed in the monolithic body and is configured to supply back side gas to the top surface. Coolant channels are formed in the monolithic body and are configured to receive fluid to control a temperature of the monolithic body.

Abstract: An electrostatic chuck for a substrate processing system is provided. The electrostatic chuck includes: a top plate configured to electrostatically clamp to a substrate and formed of ceramic; an intermediate layer disposed below the top plate; and a baseplate disposed below the intermediate layer and formed of ceramic. The intermediate layer bonds the top plate to the baseplate.

Abstract: A method for electrostatically clamping an edge ring in a plasma processing chamber with an electrostatic ring clamp with at least one ring backside temperature channel for providing a flow of gas to the edge ring is provided. A vacuum is provided to the at least one ring backside temperature channel Pressure in the backside temperature channel is measured. An electrostatic ring clamping voltage is provided when the pressure in the backside temperature channel reaches a threshold maximum pressure. The vacuum to the backside temperature channel is discontinued. Pressure in the backside temperature channel is measured. If pressure in the backside temperature channel rises faster than a threshold rate, then sealing failure is indicated. If pressure in the backside temperature channel does not rise faster than the threshold rate, a plasma process is continued, using the backside temperature channel to regulate a temperature of the edge ring.

Abstract: Embodiments of the present invention provide a method, data processing system and computer program product for bridging class loader name spaces. In one embodiment, a data processing system can be provided for bridging class loader name spaces. The data processing system can include multiple, different class loaders disposed within a single run-time environment. The data processing system further can include a class loader bridge programmed to moderate access to the different class loaders in response to a request to load an object from one of two programming models containing objects concurrently in the single run-time environment.

Abstract: Embodiments of the present invention address deficiencies of the art in respect to deploying components in a modular code runtime environment and provide a method, system and computer program product for deploying containers and container extensions in a modular code runtime environment, such as the Eclipse integrated development environment. In one embodiment, a container extension deployment system can include a container, a registry of container extensions slated for deployment in the container, and a deployment plug-in to a modular code runtime environment coupled to the registry. The deployment plug-in can include an extension point configured for use by other plug-ins. The extension point, in turn, can include container extensions slated for deployment in the container. Finally, the container extensions can include services that implement an interface for starting and stopping the services and libraries in an archive.

Abstract: Embodiments of the present invention provide a method, data processing system and computer program product for bridging class loader name spaces. In one embodiment, a data processing system can be provided for bridging class loader name spaces. The data processing system can include multiple, different class loaders disposed within a single run-time environment. The data processing system further can include a class loader bridge programmed to moderate access to the different class loaders in response to a request to load an object from one of two programming models containing objects concurrently in the single run-time environment.

Abstract: In a modular code runtime environment, a reusable software component deployment system can include a reusable software component container, a registry of reusable software components slated for deployment in the container, and a deployment plug-in to the modular code runtime environment coupled to the registry. The deployment component can include an extension point configured for use by other plug-ins including reusable software components slated for deployment in the container. In one aspect of the invention, the reusable software components can include enterprise beans. In this regard, each of the other plug-ins can include a bundle of enterprise beans and a manifest referencing the extension point and listing the enterprise beans which are to be registered in the registry through the deployment plug-in. Finally, the modular code runtime platform can be the Eclipse integrated development environment.