Patents by Inventor Keith Laurence COMENDANT

Keith Laurence COMENDANT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
    Patent number: 11942351
    Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.
    Type: Grant
    Filed: April 26, 2023
    Date of Patent: March 26, 2024
    Assignee: Lam Research Corporation
    Inventors: Alexander Matyushkin, Keith Laurence Comendant, John Patrick Holland
  • ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOVE AND MONOPOLAR ELECTROSTATIC CLAMPING ELECTRODE PATTERNS
    Publication number: 20230260816
    Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.
    Type: Application
    Filed: April 26, 2023
    Publication date: August 17, 2023
    Inventors: Alexander Matyushkin, Keith Laurence Comendant, John Patrick Holland
  • Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
    Patent number: 11664262
    Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: May 30, 2023
    Assignee: Lam Research Corporation
    Inventors: Alexander Matyushkin, Keith Laurence Comendant, John Patrick Holland
  • ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOVE AND MONOPOLAR ELECTROSTATIC CLAMPING ELECTRODE PATTERNS
    Publication number: 20210005494
    Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.
    Type: Application
    Filed: April 5, 2018
    Publication date: January 7, 2021
    Inventors: Alexander MATYUSHKIN, Keith Laurence COMENDANT, John Patrick HOLLAND
  • Lightup prevention using multi-layer ceramic fabrication techniques
    Patent number: 9608550
    Abstract: In accordance with this disclosure, there are provided several inventions, including an electrostatic chuck apparatus comprising multiple layers with cutouts that form a labyrinth structure which defined a path for cooling or heating gas. The structure prevents particles from accelerating such that they form unwanted lightup in the gas flow path.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: March 28, 2017
    Assignee: Lam Research Corporation
    Inventor: Keith Laurence Comendant
  • LIGHTUP PREVENTION USING MULTI-LAYER CERAMIC FABRICATION TECHNIQUES
    Publication number: 20160352260
    Abstract: In accordance with this disclosure, there are provided several inventions, including an electrostatic chuck apparatus comprising multiple layers with cutouts that form a labyrinth structure which defined a path for cooling or heating gas. The structure prevents particles from accelerating such that they form unwanted lightup in the gas flow path.
    Type: Application
    Filed: May 29, 2015
    Publication date: December 1, 2016
    Inventor: Keith Laurence COMENDANT