Patents by Inventor Keith Matthei

Keith Matthei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030104141
    Abstract: In one embodiment, the present invention is a method of coating at least one wafer with silicon nitride. The first step in the method is assembling at least one electrode set, wherein each electrode set includes at least one dielectric barrier between a top electrode and a bottom electrode. The second step is flowing at least one purge gas and at least one reactant at least partially between the electrodes, of at least one electrode set, substantially at atmospheric pressure. The next step in the inventive method is placing a wafer between the electrodes of at least one electrode set, wherein the wafer is substantially encompassed by the flowing gas. The last step in this embodiment of the inventive method is supplying AC power to at least one electrode set thereby causing a dielectric barrier discharge.
    Type: Application
    Filed: August 27, 2002
    Publication date: June 5, 2003
    Inventors: Carmela C. Amato-Wierda, Mohan Chandra, Keith Matthei, Alleppey V. Hariharan
  • Patent number: 6491971
    Abstract: A method for preparing a release coating and applying it to crucibles used to contain molten material while it solidifies, by mixing a release coating power with a dry organic binder into a powder and binder dry mixture, mixing a defoamer with a liquid into a liquid and defoamer mixture, mixing the dry mixture with the liquid and defoamer mixture into a wet release coating, sieving to remove lumps and particles, checking the viscosity, wet-spraying onto a crucible, evaporating the liquid from the wet release coating so as to leave a dry release coating on the crucible, and separating the binder from the dry release coating by thermal decomposition.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: December 10, 2002
    Assignee: G.T. Equipment Technologies, Inc
    Inventors: Michael A Costantini, Mohan Chandra, Keith Matthei, Alleppey V. Hariharan
  • Publication number: 20020146510
    Abstract: A method for preparing a release coating and applying it to crucibles used to contain molten material while it solidifies, by mixing a release coating power with a dry organic binder into a powder and binder dry mixture, mixing a defoamer with a liquid into a liquid and defoamer mixture, mixing the dry mixture with the liquid and defoamer mixture into a wet release coating, sieving to remove lumps and particles, checking the viscosity, wet-spraying onto a crucible, evaporating the liquid from the wet release coating so as to leave a dry release coating on the crucible, and separating the binder from the dry release coating by thermal decomposition.
    Type: Application
    Filed: April 6, 2001
    Publication date: October 10, 2002
    Inventors: Michael A. Costantini, Mohan Chandra, Keith Matthei, Alleppey V. Hariharan
  • Publication number: 20020076501
    Abstract: A method for preparing a release coating and applying it to crucibles used to contain molten material while it solidifies, such as in the directional solidification of polycrystalline silicon into ingots, by mixing a release coating power with a dry organic binder into a powder and binder dry mixture, mixing a defoamer with a liquid into a liquid and defoamer mixture, mixing the dry mixture with the liquid and defoamer mixture into a wet release coating, sieving to remove lumps and particles, checking the viscosity, wet-spraying onto a crucible at about room temperature, evaporating the liquid from the wet release coating so as to leave a dry release coating on the crucible, and separating the binder from the dry release coating by thermal decomposition.
    Type: Application
    Filed: November 15, 2001
    Publication date: June 20, 2002
    Inventors: Michael Costantini, Mohan Chandra, Keith Matthei, Alleppey V. Hariharan