Patents by Inventor Keith R. Lawson

Keith R. Lawson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for dynamic semiconductor process scheduling
    Patent number: 10566223
    Abstract: Embodiments of the present disclosure can help increase throughput and reduce resource conflicts and delays in semiconductor processing tools. An exemplary method according to various aspects of the present disclosure includes analyzing, by a computer program operating on a computer system, a plurality of expected times to complete each of a respective plurality of actions to be performed by a semiconductor processing tool, the semiconductor processing too including a first process module and a second process module.
    Type: Grant
    Filed: May 17, 2017
    Date of Patent: February 18, 2020
    Assignee: ASM IP Holdings B.V.
    Inventors: Keith R. Lawson, Michael E. Givens
  • SYSTEMS AND METHODS FOR DYNAMIC SEMICONDUCTOR PROCESS SCHEDULING
    Publication number: 20170256429
    Abstract: Embodiments of the present disclosure can help increase throughput and reduce resource conflicts and delays in semiconductor processing tools. An exemplary method according to various aspects of the present disclosure includes analyzing, by a computer program operating on a computer system, a plurality of expected times to complete each of a respective plurality of actions to be performed by a semiconductor processing tool, the semiconductor processing tool including a first process module and a second process module.
    Type: Application
    Filed: May 17, 2017
    Publication date: September 7, 2017
    Inventors: Keith R. Lawson, Michael E. Givens
  • Systems and methods for dynamic semiconductor process scheduling
    Patent number: 9659799
    Abstract: Embodiments of the present disclosure can help increase throughput and reduce resource conflicts and delays in semiconductor processing tools. An exemplary method according to various aspects of the present disclosure includes analyzing, by a computer program operating on a computer system, a plurality of expected times to complete each of a respective plurality of actions to be performed by a semiconductor processing tool, the semiconductor processing tool including a first process module and a second process module.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: May 23, 2017
    Assignee: ASM IP Holding B.V.
    Inventors: Keith R. Lawson, Michael E. Givens
  • Systems and methods for mass flow controller verification
    Patent number: 9169975
    Abstract: A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: October 27, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Michael Christopher Sarin, Rafael Mendez, Gregory M. Bartlett, Eric Hill, Keith R. Lawson, Andy Rosser
  • SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION
    Publication number: 20140060147
    Abstract: A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: ASM IP Holding B.V.
    Inventors: Michael Christopher Sarin, Rafael Mendez, Gregory Bartlett, Eric Hill, Keith R. Lawson, Andy Rosser
  • SYSTEMS AND METHODS FOR DYNAMIC SEMICONDUCTOR PROCESS SCHEDULING
    Publication number: 20140067110
    Abstract: Embodiments of the present disclosure can help increase throughput and reduce resource conflicts and delays in semiconductor processing tools. An exemplary method according to various aspects of the present disclosure includes analyzing, by a computer program operating on a computer system, a plurality of expected times to complete each of a respective plurality of actions to be performed by a semiconductor processing tool, the semiconductor processing tool including a first process module and a second process module.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: ASM IP Holding B.V.
    Inventors: Keith R. Lawson, Michael E. Givens